1
Yoshikazu Miyajima, Tsuneo Takashima, Yukio Takabayashi: Stage device, an exposure apparatus and a device manufacturing method using the same. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, July 24, 2001: US06266133 (43 worldwide citation)

A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first posit ...


2
Yoshikazu Miyajima, Hideki Nogawa: Exposure apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, October 5, 2004: US06801301 (42 worldwide citation)

An exposure apparatus includes a movable stage, a chuck device which is arranged on the stage and holds a substrate, a first gas supply device for supplying a gas to a position of the substrate to be exposed, and a plurality of divided planar members which are arranged adjacent to a periphery of the ...


3
Yoshikazu Miyajima, Naohisa Hirao: Air cleaner system for motorcycle. Honda Giken Kogyo Kabushiki Kaisha, Birch Stewart Kolasch & Birch, June 25, 2002: US06409783 (29 worldwide citation)

To dispose an air cleaner having a large capacity under a fuel tank without changing the capacity and mounting height of the fuel tank. An air cleaner is disposed under a fuel tank in such a manner as to be housed in a space surrounded by a head box and right and left main frames. Independent air cl ...


4
Yoshikazu Miyajima, Yukio Tokuda: Stage system for exposure apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, November 20, 2001: US06320649 (23 worldwide citation)

A stage system includes a movable stage having a static bearing and a magnet preloading mechanism, and a base having a guiding surface for guiding the movable stage. The base has an accumulated structure including a first layer of a magnetic material provided at the guiding surface, and a second lay ...


5
Yoshikazu Miyajima, Tsuneo Takashima, Yukio Takabayashi: Stage device, an exposure apparatus and a device manufacturing method using the same. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, June 24, 2003: US06583859 (18 worldwide citation)

A stage device includes a movable body, movable along a guide surface, for moving an element mounted on the movable body, a static pressure bearing, having at least one pad, for guiding the movable body along the guide surface, the at least one pad being attached to the movable body at a first posit ...


6
Yoshikazu Miyajima: Exposure apparatus and device manufacturing method. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, July 17, 2001: US06262794 (12 worldwide citation)

An exposure apparatus includes a projection optical system for projecting, in a slit, a pattern of an original onto a substrate, the original being held by a stage and being moved in a scan direction, along a straight line, a scanning device for relatively and scanningly moving the original and the ...


7
Yoshikazu Miyajima: Substrate-holding technique. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, May 27, 2008: US07379162 (11 worldwide citation)

A substrate holding apparatus contacts an undersurface of a substrate and holds the substrate. At least a portion of a top surface of the substrate is to be immersed in liquid. The apparatus includes a chuck unit to attract the substrate and a preventing system to prevent the liquid from reaching th ...


8
Hiroaki Kakimoto, Nobuaki Date, Yoshikazu Miyajima, Masahiko Chaya: Magnetooptical information recording/reproducing method and apparatus employing a floating slider supporting a magnetic head. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, February 18, 1997: US05604719 (9 worldwide citation)

A magnetooptical information recording/reproducing apparatus is provided with a floating slider for supporting a magnetic head for applying a magnetic field modulated according to information to a magnetooptical information recording medium. The floating slider is adapted to be retracted from the re ...


9
Yoshikazu Miyajima, Makoto Shiho: Recording head for magneto-optical information recording apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, June 27, 1989: US04843600 (9 worldwide citation)

A magneto-optical information recording apparatus comprises an objective for condensing a light beam on a magneto-optical recording medium, a bias magnetic field producing device provided on the opposite side of the objective with respect to the magneto-optical recording medium and applying a magnet ...


10
Yoshikazu Miyajima: Magneto-optical recording/reproducing method with optical head servo inhibited during magnetic head loading. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, January 3, 1995: US05379283 (9 worldwide citation)

In a magneto-optical recording/reproducing method, recording of information is effected on a magneto-optical recording disk by irradiating the magneto-optical disk with a laser beam from an optical head while applying a magnetic field modulated according to information from a flying magnetic head. A ...