1
Yao En Li, Joseph E Paganessi, David Vassallo, Gregory K Fleming: Process and system for separation and recovery of perfluorocompound gases. American Air Liquide, Burns Doane Swecker & Mathis L, January 12, 1999: US05858065 (46 worldwide citation)

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predetermined pressure ...


2
Yao En Li, Eric L Duchateau: Process and system for selective abatement of reactive gases and recovery of perfluorocompound gases. L Air Liquide Societe Anonyme pour l Etude et l Exploitation des Procedes Georges Claude, American Air Liquide, Jeffrey L Wendt, June 2, 1998: US05759237 (35 worldwide citation)

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predet ...


3
Yao En Li, Joseph E Paganessi, David Vassallo, Gregory K Fleming: Process and system for separation and recovery of perfluorocompound gases. L Air Liquide Societe Anonyme pour l Etude et l Exploitation des Procedes Georges Claude, American Air Liquide, Jeffrey L Wendt, July 28, 1998: US05785741 (26 worldwide citation)

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predet ...


4
Yao En Li: Process for recovering CF.sub.4 and C.sub.2 F.sub.6 from a gas. American Air Liquide, Burns Doane Swecker & Mathis L, September 29, 1998: US05814127 (22 worldwide citation)

A process for recovering at least one of CF.sub.4 and C.sub.2 F.sub.6 from a vent gas from an aluminum electrolysis cell. The process includes the steps of:


5
Yao En Li, Joseph E Paganessi, David Vassallo, Gregory K Fleming: Process and system for separation and recovery of perfluorocompound gases. American Air Liquide, l Air Liquide Societe Anonyme Pour l Etude et l Exploitation Des Procedes Georges Claude, Jeffrey L Wendt, July 6, 1999: US05919285 (20 worldwide citation)

Processes and systems to recover at least one perfluorocompound gas from a gas mixture are provided. In one embodiment the inventive process comprises the steps of a) providing a gas mixture comprising at least one perfluorocompound gas and at least one carrier gas, the gas mixture being at a predet ...


6
Yao En Li, Magdy Meimari: Process for recovering SF6 from a gas. American Air Liquide, Burns Doane Swecker & Mathis L, January 5, 1999: US05855647 (20 worldwide citation)

A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate ...


7
Yao En Li, John Rizos, Gerhard Kasper: Process for passivating metal surfaces to enhance the stability of gaseous hydride mixtures at low concentration in contact therewith. American Air Liquide Chicago Research Center, Oblon Spivak McClelland Maier & Neustadt, January 2, 1996: US05480677 (17 worldwide citation)

A process for passivating a metal surface to enhance the stability of a gas mixture containing one or more gaseous hydrides in low concentration in contact therewith, which comprises:


8
Yao En Li, John Rizos: Chemical purification for semiconductor processing by partial condensation. American Air Liquide, Townsend and Townsend Khourie and Crew, June 27, 1995: US05426944 (14 worldwide citation)

A purification method and apparatus for creating ultra-purity chemicals for semiconductor processing. The purification method includes a step of expanding an ESG chemical through an orifice (17) inside a condenser (21) to a partial condensed state for removing impurities from ESG chemical. During th ...


9
Yao En Li, John Rizos, Gerhard Kasper: Process for drying metal surfaces using gaseous hydrides to inhibit moisture adsorption and for removing adsorbed moisture from the metal surfaces. American Air Liquide Chicago Research Center, Oblon Spivak McClelland Maier & Neustadt, October 26, 1993: US05255445 (12 worldwide citation)

A process for drying a metal surface to enhance the stability of a gas mixture containing one or more gaseous hydrides in low concentration in contact therewith, which comprises: a) purging gas in contact with the metal surface with inert gas to remove the purged gas, b) exposing the metal surface t ...


10
Yao En Li, Magdy Meimari: Process for recovering SF.sub.6 from a gas. American Air Liquide, Air Liquide Canada, Burns Doane Swecker & Mathis L, August 1, 2000: US06096114 (9 worldwide citation)

A process for recovering SF.sub.6 from a gas is provided. The process includes the step of contacting a gas stream comprising SF.sub.6 and at least one of N.sub.2, O.sub.2, CO.sub.2, and H.sub.2 O with a membrane in at least one membrane separation unit at conditions effective to obtain a retentate ...