1
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, February 12, 2002: US06345502 (122 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


2
Yu Chong Tai, Xuan Qi Wang: Parylene micro check valve and fabrication method thereof. California Institute of Technology, Fish & Richardson P C, June 5, 2001: US06240962 (47 worldwide citation)

The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow le ...


3
Yu Chong Tai, Xuan Qi Wang: Parylene micro check valve and fabrication method thereof. California Institute of Technology, Fish & Richardson P C, March 23, 2004: US06709604 (30 worldwide citation)

The present disclosure describes a Parylene micro check valve including a micromachined silicon valve seat with a roughened top surface to which a membrane cap is anchored by twist-up tethers. The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow le ...


4
David Xuan Qi Wang, Jason Yao: Low defect method for die singulation and for structural support for handling thin film devices. OMM, Arien Ferrell Aagaard & Balzan, June 3, 2003: US06573156 (26 worldwide citation)

In certain implementations, a method for chip singulation is provided including etching a frontside dicing trench from a front side of a wafer, forming a temporary holding material, in the frontside dicing trench, etching a backside dicing trench from a back side of the wafer along the frontside dic ...


5
Yu Chong Tai, Xing Yang, Charles Grosjean, Xuan Qi Wang: Micromachined parylene membrane valve and pump. California Institute of Technology, Fish & Richardson P C, March 2, 2004: US06699394 (20 worldwide citation)

A micromachined fluid handling device having improved properties. The valve is made of reinforced parylene. A heater heats a fluid to expand the fluid. The heater is formed on unsupported silicon nitride to reduce the power. The device can be used to form a valve or a pump. Another embodiment forms ...


6
Yu Chong Tai, Xuan Qi Wang: Normally closed in-channel micro check valve. California Institute of Technology, Fish & Richardson P C, October 29, 2002: US06470904 (18 worldwide citation)

In an embodiment, a check valve assembly may include an in-channel check valve connected between the front and rear portions of a channel attached to a silicon substrate. The channel may have a width between about 10 &mgr;m and about 400 &mgr;m, and the check valve may have a width between about 50 ...


7
Yu Chong Tai, Ellis Meng, Xuan Qi Wang, Charles Grosjean: Check-valved silicon diaphragm pump and method of fabricating the same. California Institute of Technology, Daniel L Dawes Esq, Myers Dawes & Andras, January 1, 2002: US06334761 (18 worldwide citation)

A silicone rubber diaphragm pump utilizing a pair of MEMS Parylene check valves and a miniature solenoid plunger and actuator is comprised of a spacer sandwiched by a silicone rubber diaphragm on one side and a check valve support on the other. The check valves in the check valve support form the in ...


8
David Xuan Qi Wang, Mehrdad M Moslehi: Substrate release methods and apparatuses. Solexel, Hulsey P C, June 29, 2010: US07745313 (12 worldwide citation)

The present disclosure relates to methods and apparatuses for fracturing or breaking a buried porous semiconductor layer to separate a 3-D thin-film semiconductor semiconductor (TFSS) substrate from a 3-D crystalline semiconductor template. The method involves forming a sacrificial porous semiconduc ...


9
David Xuan Qi Wang, Mehrdad M Moslehi: Three-dimensional semiconductor template for making high efficiency thin-film solar cells. Solexel, Hulsey P C, William N Hulsey III, John Ryan Cecil Wood, May 1, 2012: US08168465 (11 worldwide citation)

A semiconductor template having a top surface aligned along a (100) crystallographic orientation plane and an inverted pyramidal cavity defined by a plurality of walls aligned along a (111) crystallographic orientation plane. A method for manufacturing a semiconductor template by selectively removin ...


10
Mehrdad M Moslehi, David Xuan Qi Wang, Sam Tone Tor, Karl Josef Kramer: Method for releasing a thin semiconductor substrate from a reusable template. Solexel, Hulsey P C, William N Hulsey III, Loren T Smith, June 5, 2012: US08193076 (10 worldwide citation)

The present disclosure relates to methods and apparatuses template. The method involves forming a mechanically weak layer conformally on a semiconductor template. Then forming a thin for releasing a thin semiconductor substrate from a reusable semiconductor substrate conformally on the mechanically ...