1
Jonathan G Bornstein, William C Banyai, David M Bloom, Ralph G Whitten, Bryan P Staker: Method of making and an apparatus for a flat diffraction grating light valve. Silicon Light Machines, Haverstock & Associates, August 26, 1997: US05661592 (208 worldwide citation)

A deformable grating aparatus for modulating light is made by forming an insulating layer on a substrate, forming a first conductive layer on the insulating layer and then forming a sacrificial layer thereon. The sacrificial layer and the first conducting layer are then etched to define bit lines an ...


2
David M Bloom, Dave B Corbin, William C Banyai, Bryan P Straker: Flat diffraction grating light valve. Silicon Light Machines, Haverstock & Owens, November 24, 1998: US05841579 (147 worldwide citation)

A diffraction grating light valve modulates an incident beam of light. A plurality of elongated elements each have a reflective surface. The elongated elements are suspended with their respective ends substantially coplanar. Alternate ones of the elongated elements are electrically coupled for recei ...


3
Bryan P Staker, William C Banyai: Folded longitudinal torsional hinge for gimbaled MEMS mirror. Glimmerglass Networks, Townsend and Townsend and Crew, Kenneth R Allen, August 30, 2005: US06935759 (7 worldwide citation)

In a gimbaled micromachined micromirror array optimized for parallel-plate electrostatic operation, longitudinal-type gimbal hinge elements are provided in which a plurality of torsional longitudinal hinge elements are arranged in an array parallel to the axis of rotation and which are linked togeth ...