1
Yu Chong Tai, Tseng Yang Hsu, Wen H Hsieh: Thin film electret microphone. California Institute of Technology, Fish & Richarson P C, June 5, 2001: US06243474 (66 worldwide citation)

A small, inexpensive, high quality electret formed by micro-machining technology on a support surface, and further including a small, inexpensive, high quality, self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is ma ...


2
Yu Chong Tai, Tseng Yang Hsu, Wen H Hsieh: Thin film electret microphone. California Institute of Technology, Fish & Richardson P C, October 19, 2004: US06806593 (24 worldwide citation)

An electret formed by micro-machining technology on a support surface, including a self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a mi ...


3
Yu Chong Tai, Tseng Yang Hsu, Wen H Hsieh: Thin film electret microphone. California Institute of Technology a California Institute of Technology, Fish & Richardson PC, October 25, 2001: US20010033670-A1

An electret formed by micro-machining technology on a support surface, including a self-powered electret sound transducer, preferably in the form of a microphone, formed by micro-machining technology. Each microphone is manufactured as a two-piece unit, comprising a microphone membrane unit and a mi ...