1
Thomas L Kraft, Lisa W Rogers, Van Hoskins, Lou Waters, Robert Meyers, Kenneth E Reynolds, Stuart S Crader, David Loebig: Medication dispenser system. Owen Healthcare, Vinson & Elkins, April 2, 1996: US05502944 (217 worldwide citation)

A medication dispenser for use in a hospital or other medical setting comprises a plurality of containers for holding medication units, packaging apparatus for containing one or more medication units in a package and robotics for manipulating a selected container to transfer one or more medication u ...


2
Gary Wyka, Jaime Carrera, Van Hoskins: Detection system for substrate clamp. Applied Materials, Moser Patterson & Sheridan, November 6, 2001: US06313596 (29 worldwide citation)

The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal ...


3
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Dave Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Cartesian robot cluster tool architecture. Applied Materials, Patterson & Sheridan, January 26, 2010: US07651306 (25 worldwide citation)

Embodiments of the invention provide a method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robots that are config ...


4
Gary Wyka, Jaime Carrera, Van Hoskins: Detection system for substrate clamp. Applied Materials, Thomason Moser & Patterson, December 26, 2000: US06166509 (18 worldwide citation)

The present invention provides a method and apparatus for determining whether a substrate is in a clamped or unclamped state on a robot blade and preferably allows the position of a properly clamped substrate to be compensated for misalignments due to substrates not at or very near to their nominal ...


5
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Dave Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Substrate processing sequence in a cartesian robot cluster tool. Applied Materials, Patterson & Sheridan, September 21, 2010: US07798764 (11 worldwide citation)

A method and apparatus for processing substrates using a cluster tool that has an increased system throughput, increased system reliability, improved device yield performance, and a reduced footprint. The various embodiments of the cluster tool may utilize two or more robot assemblies that are confi ...


6
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Mario David Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Method of retaining a substrate during a substrate transferring process. Applied Materials, Patterson & Sheridan, May 20, 2008: US07374393 (10 worldwide citation)

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. ...


7
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Dave Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Substrate processing sequence in a Cartesian robot cluster tool. Applied Materials, Patterson & Sheridan L, November 29, 2011: US08066466 (7 worldwide citation)

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, th ...


8
Michael Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Mario David Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Substrate gripper for a substrate handling robot. Applied Materials, Patterson & Sheridan, May 20, 2008: US07374391 (6 worldwide citation)

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. ...


9
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Dave Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Substrate processing sequence in a cartesian robot cluster tool. Applied Materials, Patterson & Sheridan, December 16, 2014: US08911193 (3 worldwide citation)

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, is provided. In one embodiment of the invention, a robot assembly is provided. The robot assembly includes a first motion assembly movable in a first direction, and a second motion assembly, th ...


10
Mike Rice, Jeffrey Hudgens, Charles Carlson, William Tyler Weaver, Robert Lowrance, Eric Englhardt, Dean C Hruzek, Mario David Silvetti, Michael Kuchar, Kirk Van Katwyk, Van Hoskins, Vinay Shah: Method of retaining a substrate during a substrate transferring process. Applied Materials, Patterson & Sheridan, June 28, 2007: US20070147982-A1

A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. ...