1
Franken Dominicus Jacobus, Jacobs Franciscus Mathijs, Van Kimmenade Johannes Mathijs, Van Dijk Cornelis Dionysius, Van Eijk Jan: Lithographic device with a suspended object table.. Philips, Asm Lithography, August 12, 1992: EP0498496-A1 (17 worldwide citation)

A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation syste ...


2
VAN Dijk Cornelis Dionysius: Device for cutting rings from a hollow, thin-walled and elongate cylindrical object. US Philips Corporation, Trifari Frank R, Treacy David R, October 21, 1975: US3913430 (11 worldwide citation)

A device for cutting rings from a hollow, cylindrical object, comprising an annular die in which a rotatable cutting head is arranged. The cutting head supports one or more cutting rollers which are journalled with axial play in a radially movable slide. The cutting edges of the cutting rollers coop ...


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Buelens Jozef Johannes Corneli, Essers Wilhelmus Gerardus, Van Dijk Cornelis Dionysius, Trapman Jan: Apparatus for axially feeding a wire.. Philips, November 7, 1984: EP0124170-A1 (8 worldwide citation)

An apparatus for axially feeding a wire comprises a housing having at least one reciprocable wire-gripping device (1) which has a plane of symmetry (H - H) and comprises first and second wire guides (17, 18) which are located in two walls disposed opposite one another through which wire guides (17, ...


4
Van Dijk Cornelis Dionysius, Thiry Michel Paul Ambroise, Trapman Jan: Device for axially feeding a wire.. Philips, November 7, 1984: EP0124169-A1

A device for axially feeding a wire, which device comprises a housing (9) which has a driving unit (10) having a driving shaft (11) and at least two relatively reciprocable wire-drivers (1, 2) placed one behind the other and which are each connected to an associated slide (3, 4) of a guiding mechnis ...


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Van Engelen Gerard, Sperling Frank Bernhard, Janssen Henricus Wilhelmus Alo, Bouwer Adianus Gerardus, Van Dijk Cornelis Dionysius, Van Kimmenade Johannes Mathijs, Van Eijk Jan, Van Der Pal Adrianus: A positioning device with a reference frame for a measuring system. Philips Electronics, Asm Lithography, May 14, 1997: EP0772801-A1

The positioning appts. includes an substrate table (1), a subsystem for processing an object on the table, a drive unit (21) displacing the table, and a system (39) measuring the position of table w.r.t. the subsystem. The drive unit has a stationary part fastened to the positioning appts. machine f ...


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Van Engelen Gerard, Van Dijk Cornelis Dionysius, Van Kimmenade Johannes Mathijs, Van Eijk Jan: Positioning device with a vibration-free object table. Philips Electronics, Asm Lithography, August 27, 1997: EP0791189-A1

A positioning device (21) has a drive unit (69) and object table (5) displaced over a guide and frame (65,45). A stationary part (73) of the drive unit is connected to a second frame (41), thus dynamically isolated it from the first frame. Reaction forces of the object table on the drive unit are tr ...


8
Van Engelen Gerard, Bernhard Sperling Frank, Janssen Henricus Wilhelmus Aloysius, Bouwer Adianus Gerardus, Van Dijk Cornelis Dionysius, Van Kimmenade Johannes Mathijs Maria, Van Eijk Jan, Van Der Pal Adrianus: Positioning device having reference frame for measuring system. Asml Netherlands, January 12, 2006: JP2006-012866

PROBLEM TO BE SOLVED: To arrange a mask table (5), a projection system (3), a substrate table (1) that can be moved to the projection system (3) by a driving unit (21) and a measuring system (39) measuring the position of the substrate table (1) with respect to the projection system (3) in a lithogr ...