1
Trotel Jacques, Guillot Georges, Fay Bernard: Motor control for the production of masks for subminiaturised circuits. Thomson-CSF, Cushman Darby & Cushman, October 22, 1974: US3843916 (28 worldwide citation)

An electronic apparatus for the mass production of masks for integrated circuits, comprises a master mask arranged in an evacuated chamber. In response to diffuse ultra-violet radiation, it emits from its transparent areas electrons which are focussed by uniform electric and magnetic fields which ar ...


2
Trotel Jacques: Dispositif de microlithographie par bombardement electronique. Thomson-CSF, June 27, 1980: FR2443085-A1 (10 worldwide citation)

L'invention a pour objet un dispositif de microlithographie par bombardement électronique.


3
Trotel Jacques: Device for increasing the accuracy of addressing an electron beam striking a target. Thomson-CSF, Oblon Fisher Spivak McClelland & Maier, February 4, 1975: US3864597 (8 worldwide citation)

The present invention relates to systems which utilise a very thin electron beam (diameter one-tenth of a micron or less) to reach a point upon a given surface or to write-in an information there or to read one information therefrom. The object of the invention is to achieve a relative accuracy in t ...


4
Fay Bernard, Trotel Jacques, Frichet Alain: Process for optically aligning patterns in two planes close to one another and alignment device to realize such a process.. Thomson-CSF, May 14, 1980: EP0010998-A1 (5 worldwide citation)

L'invention se rapporte à l'alignement de motifs dans deux plans rapprochés, l'un (masque) portant un motif à reproduire sur le deuxième (échantillon). L'invention a pour objet un procédé d'alignement optique de ces deux plans utilisant un couple de repères formés d'une lentille à zones de Fresnel l ...


5
Trotel Jacques, Dubee Andre, Jullien Yves: Procede de positionnement, de maintien dun substrat plan sur une platine porte-substrat et de retrait de ce substrat ainsi que lappareillage pour la mise en oeuvre du procede. Thomson-CSF, September 17, 1982: FR2501907-A1 (5 worldwide citation)

LE PROCEDE DE L'INVENTION CONSISTE A METTRE EN PLACE UNE COUCHE SUPERFICIELLE D'UN MATERIAU ELASTOMERE 2 SUR LA PLATINE PORTE-SUBSTRAT 1 ET DE MAINTENIR LE SUBSTRAT 4 PAR ATTRACTION MOLECULAIRE.


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Trotel Jacques: Dispositif de microlithographie par bombardement electronique. Thomson-CSF, January 30, 1981: FR2461281-A2 (3 worldwide citation)

L'ADDITION A POUR OBJET UN DISPOSITIF DE MICROLITHOGRAPHIE PAR BOMBARDEMENT.


9
Trotel Jacques, Sigelle Robert: Electronic devices for the programmed tracing of patterns. Thomson-CSF, Cushman Darby & Cushman, June 11, 1974: US3816719 (3 worldwide citation)

A system is capable on the basis of data produced by a data processing machine of generating signals which can be applied to the horizontal and vertical deflection systems of an electronic device capable of producing predetermined traces. Each trace is broken down into elementary figures of three pr ...


10
Trotel Jacques: Arrangement for the programmed inscription of patterns having different configurations by bombarding a target by a beam of particles.. Thomson-CSF, June 13, 1979: EP0002409-A1 (3 worldwide citation)

1. Device permitting the programmed design of figures of different shapes by bombardment of a target by a particle beam of adjustable section produced by a particle source (100), the figures being composed of elementary image (R1 to R5 ) of variable shapes each associated with one reference point wh ...