1
Tony R Kroeker: Three chamber load lock apparatus. Applied Materials, Patterson & Associates, October 5, 1999: US05961269 (32 worldwide citation)

A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each load lock chamber preferably has a semi-cyli ...


2
Tony R Kroeker, Benjamin W Mooring, Nicolas J Bright: Dual sided slot valve and method for implementing the same. Lam Research Corporation, Martine Penilla & Kim, August 1, 2000: US06095741 (26 worldwide citation)

A dual sided slot valve is in a vacuum body between adjacent process and transport modules. Separate valves are provided for each of two valve body slots, one body slot being separately closed or opened independently of the other. The separate valves allow a vacuum in the transport module while an a ...


3
Tony R Kroeker: Wafer cooling in a transfer chamber of a vacuum processing system. Applied Materials, Thomason Moser & Patterson, December 14, 1999: US06000227 (22 worldwide citation)

A vacuum processing system has a wafer cooling system disposed on a lid of a transfer chamber so that heated wafers are cooled inside the transfer chamber. The wafer cooling system has a wafer lift assembly and a wafer cooler. The wafer cooler has a cooling plate and a coolant tank disposed through ...


4
Tony R Kroeker: Three chamber load lock apparatus. Applied Materials, Thomas Moser & Patterson L, June 26, 2001: US06250869 (19 worldwide citation)

A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each load lock chamber preferably has a semi-cyli ...


5
Tony R Kroeker, Gregory A Tomasch: Single shaft dual cradle vacuum slot valve. Lam Research Corporation, Martine & Penilla, May 21, 2002: US06390448 (19 worldwide citation)

A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single s ...


6
Tony R Kroeker: Three chamber load lock apparatus. Applied Materials, Moser Patterson and Sheridan, December 17, 2002: US06494670 (15 worldwide citation)

A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing platform for making integrated circuits on silicon wafers. Each load lock chamber preferably has a semi-cyli ...


7
Tony R Kroeker, Larry Cook: Atmospheric wafer transfer module with nest for wafer transport robot. Lam Research Corporation, Martine Penilla & Kim, June 12, 2001: US06244811 (10 worldwide citation)

A load lock wafer transfer face is provided at an acute angle with respect to a footprint dimension line, so the length of the footprint dimension line does not include the entire minimum length of the wafer transfer distance that must separate a robot from the wafer transfer face of a load lock. Tw ...


8
Tony R Kroeker, Gregory A Tomasch: Methods of implementing a single shaft, dual cradle vacuum slot valve. Lam Research Corporation, Martine & Penilla, May 20, 2003: US06564818 (8 worldwide citation)

A single slot valve shaft is in a vacuum body between adjacent vacuum chambers, such as a process module and a transport module. Separate valves are provided on the single shaft actuator for each of two valve body slots, each body slot being closed or opened according to the position of the single s ...


9
Elmer L B Kroeker, Tony R Kroeker, Robert N Sage: Press with pin detection for interference connectors. International Business Machines Corporation, Mark E McBurney, August 17, 1993: US05235740 (6 worldwide citation)

A method and apparatus is provided which allows simultaneous placement of electrical components on to a printed circuit board (PCB). Further, verification of the proper placement of these components on the PCB is provided such that an operator can immediately replace any components having pins which ...


10
Jeffrey C Hudgens, Tony R Kroeker: Adjustable frog-leg robot. Applied Materials, Dugan & Dugan, May 2, 2000: US06056504 (4 worldwide citation)

An adjustable length frog-leg type wafer handler is provided. The wafer handler has two arms each having an upper portion and a lower portion. The lower portion may extend between a normal position and an extended position, and/or the upper portion may extend between an normal position and a compres ...