1
Maricela Morales
Gerald B Wayton, Peter Trefonas, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company, Edwards & Angell, Dike Bronstein Robert & Cushman IP Group, April 8, 2004: US20040067437-A1 (1 worldwide citation)

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a component such as a resin that comprises an aryl dicarboxylate group. In a further aspect, organic coating compositions are provided, particularly spin-on antireflec ...


2
Maricela Morales
Gerald B Wayton, Peter Trefonas, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company, Edwards & Angell, September 25, 2003: US20030180559-A1

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


3
Maricela Morales
Gerald B Wayton, Peter Trefonas, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company, Edwards & Angell, October 21, 2004: US20040209200-A1

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


4
Maricela Morales
Gerald B Wayton, Peter Trefonas, Suzzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company, Peter F Corless, Rohm and Haas Electronic Materials, April 26, 2007: US20070092746-A1

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


5
Gerald B Wayton, Peter Trefonas III, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company L L C, Peter F Corless, Darryl P Frickey, Edwards & Angell, February 8, 2005: US06852421 (19 worldwide citation)

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


6
Gerald B Wayton, Peter Trefonas III, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Shipley Company L L C, Peter F Corless, Darryl P Frickey, Edwards Angell Palmer & Dodge, January 16, 2007: US07163751 (8 worldwide citation)

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


7
Gerald B Wayton, Peter Trefonas III, Suzanne Coley, Tomoki Kurihara: Coating compositions for use with an overcoated photoresist. Rohm and Haas Electronic Materials, Peter F Corless, Darryl P Frickey, Edwards Angell Palmer & Dodge, September 1, 2009: US07582360 (3 worldwide citation)

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


8
Gerald B Wayton, Peter Trefonas III, Suzanne Coley, Tomoki Kurihara: Coating composition for use with an overcoated photoresist. Rohm and Haas Electronic Materials, Edwards Wildman Palmer, Peter F Corless, January 6, 2015: US08927681

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...


9
Gerald B Wayton, Peter Trefonas III, Suzanne Coley, Tomoki Kurihara: Coating composition for use with an overcoated photoresist. February 9, 2012: US20120034562-A1

In a first aspect, organic coating compositions are provided, particularly spin-on antireflective coating compositions, that contain a polyester resin component. In a further aspect, coating compositions are provided that contain a resin component obtained by polymerization of a multi-hydroxy compou ...