1
Chih Ming Ho, Denny K Miu, Jeremy Tzong Shyng Leu, Raanan Miller, Amish Desai, Chang Liu, Tom Tsao, Yu Chong Tai: Electromagnetically actuated micromachined flap. The Regents of the University of California, California Institute of Technology, Daniel L Dawes, May 13, 1997: US05629918 (99 worldwide citation)

A surface micromachined micromagnetic actuator is provided with a flap capable of achieving large deflections above 100 microns using magnetic force as the actuating force. The flap is coupled by one or more beams to a substrate and is cantilevered over the substrate. A Permalloy layer or a magnetic ...


2
Chen Wei Chiu, Aramais Avakian, Tom Tsao, Fukang Jiang, Jeff Dickson, Yu Chong Tai: Silicon micromachined optical device. Umachines, Knobbe Martens Olson & Bear, October 28, 2003: US06639713 (5 worldwide citation)

An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon an ...


3
Chen Wei Chiu, Aramais Avakian, Tom Tsao, Fukang Jiang, Jeff Dickson, Yu Chong Tai: Silicon micromachined optical device. Knobbe Martens Olson & Bear, September 26, 2002: US20020135864-A1 (2 worldwide citation)

An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon an ...


4
Chen Wei Chiu, Aramais Avakian, Tom Tsao, Fukang Jiang, Jeff Dickson, Yu Chong Tai: Method of fabricating micromachined devices. Knobbe Martens Olson & Bear, August 8, 2002: US20020106834-A1

A method for fabricating a module for at least partially intercepting a light beam propagating along a beam path includes providing a single crystal silicon substrate with a first substrate surface and a second substrate surface. The method further includes forming a reflector support layer on the f ...


5
Chen Wei Chiu, Tom Tsao, Fukang Jiang: Method of fabricating micromachined devices. Umachines, Knobbe Martens Olson & Bear, March 23, 2004: US06709886

A method for fabricating a module for at least partially intercepting a light beam propagating along a beam path includes providing a single crystal silicon substrate with a first substrate surface and a second substrate surface. The method further includes forming a reflector support layer on the f ...