1
Samuel R Shortes, Thomas C Penn: Method for removing photoresist layer from substrate by ozone treatment. Texas Instruments Incorporated, William E Hiller, Melvin Sharp, James T Comfort, July 27, 1982: US04341592 (258 worldwide citation)

Method and apparatus for removing a photoresist layer from a substrate surface of different material, such as a semiconductor slice, in the fabrication of an electronic structure, involving exposure of the photoresist layer to an ozone-containing gaseous atmosphere in a reaction zone of a reactor. T ...


2
Thomas C Penn: Apparatus and method for providing power from master controller to subcontrollers and data communication therebetween. Texas Instruments Incorporated, William E Hiller, James T Comfort, Melvin Sharp, August 13, 1985: US04535401 (108 worldwide citation)

An apparatus having a two wire system for providing both power and data communication between a master controller and at least one subcontroller. The master controller can also be connected through the conductors to submaster controllers which in turn have subcontrollers connected thereto. The maste ...


3
Jerry D Merryman, Thomas C Penn, William G Manns, Don J Weeks, Anthony B Wood: Pattern comparator with substage illumination and polygonal data representation. Texas Instruments Incorporated, James T Comfort, Melvin Sharp, B Peter Barndt, May 21, 1991: US05018210 (67 worldwide citation)

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as on ...


4
Vernon R Porter, William G Manns, Anthony B Wood, S Charles Baber, Thomas C Penn: Laser scanner using focusing acousto-optic device. Texas Instruments Incorporated, B Peter Barndt, James T Comfort, Melvin Sharp, March 27, 1990: US04912487 (33 worldwide citation)

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as on ...


5
Thomas C Penn: Method for removing resist layer from substrate with combustible gas burnoff. Texas Instruments Incorporated, William E Hiller, Melvin Sharp, James T Comfort, October 20, 1981: US04296146 (13 worldwide citation)

Method and apparatus for removing a resist layer from a substrate surface of different material, such as a semiconductor slice, in the fabrication of an electronic structure, involving exposure of the resist layer to a flame from a combustible gas. The resist layer is employed as a mask in patternin ...


6
Dipankar Chandra, Donald F Weirauch, Thomas C Penn: Mercury cadmium telluride infrared filters and detectors and methods of fabrication. Raytheon TI System, Baker & Botts L, January 19, 1999: US05861626 (11 worldwide citation)

A multiple film integrated infrared (IR) detector assembly 85 consists of detector films 86, 88, 90 having different IR spectral sensitivities which are deposited on a breadboard IR transmissive but electrically insulating substrate 42. Substrate 42 is deposited on an IR filter layer comprising an H ...


7
Vernon R Porter, William G Manns, Anthony B Wood, Jerry D Merryman, Don J Weeks, S Charles Baber, Thomas C Penn: Laser pattern/inspector with a linearly ramped chirp deflector. Texas Instruments Incorporated, W Daniel Swayze Jr, W James Brady III, Richard L Donaldson, January 7, 1997: US05592211 (10 worldwide citation)

A laser pattern inspection and/or writing system which writes or inspects a pattern on a target on a stage, by raster scanning the target pixels. Inspection can also be done by substage illumination with non-laser light. A database, organized into frames and strips, represents an ideal pattern as on ...


8
Dipankar Chandra, Donald F Weirauch, Thomas C Penn: Integrated infrared detection system. Raytheon Company, Baker Botts L, July 18, 2000: US06091127 (8 worldwide citation)

This is an integral IR detector system with at least two epitaxial HgCdTe sensors on integrated silicon or GaAs circuitry and also a method of fabricating such system. The system can comprise: a) integrated silicon or GaAs circuitry 110; b) an epitaxial lattice-match layer (e.g. ZnSe 114) on a top s ...


9
Dipankar Chandra, Donald F Weirauch, Thomas C Penn: Method of fabricating a laterally continuously graded mercury cadmium telluride layer. Raytheon Company, Baker & Botts L, March 14, 2000: US06036770 (3 worldwide citation)

Methods are described for the depositing of a plurality of films, preferably mercury cadmium telluride (HgCdTe), whose compositions vary in a controlled manner to provide unique infrared spectral absorption and detection properties. HgCdTe films 64 and 70 are deposited on opposite sides of electrica ...


10
Vernon R Porter, Thomas C Penn: Heat activated dry development of photoresist by means of active oxygen atmosphere. Texas Instruments Incorporated, William E Hiller, N Rhys Merrett, Melvin Sharp, June 18, 1991: US05024918 (3 worldwide citation)

Heat activated method for developing and improving the definition of a patterned heat-photoresist layer as applied to a substrate surface of different material, such as a semiconductor slice, in the fabrication of an electronic structure or photomask, through the use of a reactive species of oxygen ...