1
Stefan Gertud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, February 6, 2007: US07173363 (9 worldwide citation)

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


2
Stefan Gertrud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, December 20, 2005: US06977461 (8 worldwide citation)

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


3
Henrikus Herman Marie Cox, Thomas Augustus Mattaar: Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, January 24, 2012: US08102513 (1 worldwide citation)

A method for positioning an object by an electromagnetic motor which, in use, produces a plurality of primary forces and a pitch torque associated with the primary forces. The method includes a cycle which includes: determining the desired forces and torques for positioning the object, determining t ...


4
Henrikus Herman Marie Cox, Willem Herman Gertruda Anna Koenen, Thomas Augustus Mattaar, Martinus Theodorus Jacobus Pieterse, Rob Antonius Andries Verkooijen: Measurement system, method and lithographic apparatus. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, March 25, 2014: US08681316

A measurement system is configured to derive a position quantity of an object, the measurement system includes at least one position quantity sensor configured to provide respective position quantity measurement signals; a position quantity calculator configured to determine a position quantity of t ...


5
Robertus Johannes Marinus De Jongh, Petrus Marinus Christianus Maria Van Den Biggelaar, Thomas Augustus Mattaar, Jan Van De Ven: Lithographic apparatus and device manufacturing method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, May 29, 2007: US07224428

A lithographic apparatus is presented that includes a controller having a series connection of at least two integrators and an integrator output circuit for deriving an output quantity of the series connection of integrators. The controller also includes an integrator saturator that is operatively c ...


6
Henrikus Herman Marie Cox, Thomas Augustus Mattaar: Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, March 17, 2015: US08982327

A method to enable positioning of an object by a positioning device that includes an electromagnetic motor to control the position of the object in a lithographic apparatus, the method including receiving desired motor signals at the electromagnetic motor to produce a plurality of primary forces and ...


7
Robertus Johannes Marinus De Jongh, Petrus Marinus Christianus Maria Van Den Biggelaar, Thomas Augustus Mattaar, Jan Van De Ven: Lithographic apparatus and device manufacturing method. ASML Netherlands, Pillsbury Winthrop, February 17, 2005: US20050036123-A1

A lithographic apparatus is presented that includes a controller having a series connection of at least two integrators and an integrator output circuit for deriving an output quantity of the series connection of integrators. The controller also includes an integrator saturator that is operatively c ...


8
Stefan Gertud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, July 14, 2005: US20050151446-A1

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


9
Stefan Gertrud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, June 16, 2005: US20050127786-A1

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


10
Henrikus Herman Marie COX, Thomas Augustus MATTAAR: Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, April 16, 2009: US20090097003-A1

A method for positioning an object by an electromagnetic motor which, in use, produces a plurality of primary forces and a pitch torque associated with the primary forces. The method includes a cycle which includes: determining the desired forces and torques for positioning the object, determining t ...