1
David Volfson, Stephen D Senturia: High-density, multi-level interconnects, flex circuits, and tape for tab. Massachusetts Institute of Technology, Wolf Greenfield & Sacks, April 21, 1992: US05106461 (221 worldwide citation)

A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are ...


2
Antonio J Ricco, Michael A Butler, Michael B Sinclair, Stephen D Senturia: Electrically-programmable diffraction grating. Sandia Corporation, John P Hohimer, May 26, 1998: US05757536 (128 worldwide citation)

An electrically-programmable diffraction grating. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffr ...


3
Alan H Epstein, Stephen D Senturia, Ian A Waitz, Jeffrey H Lang, Stuart A Jacobson, Fredric F Ehrich, Martin A Schmidt, G K Ananthasuresh, Mark S Spearing, Kenneth S Breuer, Steven F Nagle: Microturbomachinery. Massachusetts Institute of Technology, Theresa A Lober, August 3, 1999: US05932940 (116 worldwide citation)

The invention provides a micro-gas turbine engine and associated microcomponentry. The engine components, including, e.g., a compressor, a diffuser having diffuser vanes, a combustion chamber, turbine guide vanes, and a turbine are each manufactured by, e.g., microfabrication techniques, of a struct ...


4
Michael A Butler, Antonio J Ricco, Michael B Sinclair, Stephen D Senturia: Optical apparatus for forming correlation spectrometers and optical processors. Sandia Corporation, John P Hohimer, May 18, 1999: US05905571 (100 worldwide citation)

Optical apparatus for forming correlation spectrometers and optical processors. The optical apparatus comprises one or more diffractive optical elements formed on a substrate for receiving light from a source and processing the incident light. The optical apparatus includes an addressing element for ...


5
Alan H Epstein, Stephen D Senturia, Ian A Waitz, Jeffrey H Lang, Stuart A Jacobson, Fredric F Ehrich, Martin A Schmidt, G K Ananthasuresh, Mark S Spearing, Kenneth S Breuer, Steven F Nagle: Microturbomachinery. Massachusetts Institute of Technology, Theresa A Lober, May 21, 2002: US06392313 (95 worldwide citation)

The invention overcomes limitations of conventional power and thermodynamic sources by with micromachinery components that enable production of significant power and efficient operation of thermodynamic systems in the millimeter and micron regime to meet the efficiency, mobility, modularity, weight, ...


6
Roger T Howe, Jeffrey H Lang, Martin F Schlecht, Martin A Schmidt, Stephen D Senturia: Electrostatic micromotor. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, July 24, 1990: US04943750 (81 worldwide citation)

An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field ...


7
Stephen D Senturia, Steven L Garverick: Methods and apparatus for microdielectrometry. Massachusetts Institute of Technology, Arthur A Smith Jr, Thomas J Engellenner, December 27, 1983: US04423371 (78 worldwide citation)

An impedance measuring apparatus having a measuring transistor with its gate electrode adapted to form a two electrode, interdigitated capacitor with the material to be measured forming the dielectric, a second reference transistor connected in differential configuration to the measuring transistor ...


8
Roger T Howe, Jeffrey H Lang, Martin F Schlecht, Martin A Schmidt, Stephen D Senturia, Mehran Mehregany, Lee S Tavrow: Method for fabricating side drive electrostatic micromotor. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, August 27, 1991: US05043043 (75 worldwide citation)

An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and e ...


9
David Volfson, Stephen D Senturia: High-density, multi-level interconnects, flex circuits, and tape for TAB. Massachusetts Institute of Technology, Wolf Greenfield & Sacks, December 25, 1990: US04980034 (63 worldwide citation)

A multi-layer interconnect structure of alternating dielectric (e.g., polyimide) and metal (e.g., copper) is built on a substrate supporting a continuous layer of metal. This metal layer is used as an electrode for plating vias through all the dielectric layers. Once the desired number of layers are ...


10
Roger T Howe, Jeffrey H Lang, Martin F Schlecht, Martin A Schmidt, Stephen D Senturia: Electrostatic micromotor. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, March 5, 1991: US04997521 (60 worldwide citation)

An electrostatically driven microactuator is micromachined in a monolithic process. Sacrificial layers are placed between a moving element and stator structural layers. Removal of the sacrificial layers leaves a free standing moving element and micron wide air gaps within a stator. An electric field ...