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Stefan Gertud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, February 6, 2007: US07173363 (9 worldwide citation)

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


2
Stefan Gertud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, July 14, 2005: US20050151446-A1

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...