1
Stefan Gertrud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, December 20, 2005: US06977461 (8 worldwide citation)

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


2
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens, Lodewijk Alexander Schijvenaars, Tom Van Zutphen: Lithographic apparatus and sensor calibration method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, August 16, 2011: US07999912 (1 worldwide citation)

A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a ...


3
Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens, Lodewijk Alexander Schijvenaars, Tom Van Zutphen: Lithographic apparatus and sensor calibration method. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, November 13, 2008: US20080278702-A1

A method for calibrating an auxiliary sensor system is provided. The auxiliary sensor system measures a position of a grating relative to a reference, the grating forming part of an encoder measurement system. The encoder measurement system is adapted to measure a position of a substrate table of a ...


4
Stefan Gertrud Marie Hendriks, Thomas Augustus Mattaar, Gerardus Jacobus Cornelis Catharina Maria Leenheers: System and method for moving an object employing piezo actuators. Asml Netherlands, Pillsbury Winthrop Shaw Pittman, June 16, 2005: US20050127786-A1

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...