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Sharad Saxena, Amy J Unruh, Purnendu K Mozumder, Richard G Burch: Process flow design at the module effects level through the use of acceptability regions. Texas Instruments Incorporated, Bret J Petersen, Richard L Donaldson, June 15, 1999: US05912678 (115 worldwide citation)

Methods and processes to reduce the cost and cycle time of designing manufacturing flows are described, particularly for microelectronic integrated circuit processes. One embodiment of the present invention is a method which divides the task of designing process flows into a number of abstraction le ...


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Purnendu K Mozumder, Sharad Saxena, William W Pu: Multi-variable statistical process controller for discrete manufacturing. Texas Instruments Incorporated, Ruben C DeLeon, James C Kesterson, Richard L Donaldson, April 18, 1995: US05408405 (114 worldwide citation)

A method and system for controlling a plurality of process control variables for processing discrete products is described. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process control variables; measuring the plurality of pro ...


3
Sharad Saxena: Method of diagnosing malfunctions in semiconductor manufacturing equipment. Texas Instruments Incorporated, Robert L Troike, Leo N Heiting, Richard L Donaldson, June 24, 1997: US05642296 (69 worldwide citation)

Manufacturing modern day integrated circuits requires that each of a long sequence of steps perform to a tight set of specifications. Since equipment malfunctions are inevitable, profitable manufacturing of integrated circuits requires that such malfunctions be rapidly isolated and corrected. This i ...


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Purnendu K Mozumder, Sharad Saxena: Use of spatial models for simultaneous control of various non-uniformity metrics. Texas Instruments Incorporated, Ruben C Deleon, James C Kesterson, Richard L Donaldson, August 13, 1996: US05546312 (55 worldwide citation)

A method and system have been described for simultaneously controlling one or multiple metrics of non-uniformity using a model form independent multi-variable controller. The method comprising: utilizing process models relating a plurality of product quality parameters to the plurality of process co ...


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Joseph C Davis, Karthik Vasanth, Sharad Saxena, Purnendu K Mozumder, Suraj Rao, Chenjing L Fernando, Richard G Burch: Method and system for using response-surface methodologies to determine optimal tuning parameters for complex simulators. Texas Instruments Incorporated, Wade James Brady III, Frederick J Telecky Jr, April 30, 2002: US06381564 (53 worldwide citation)

A method and system for providing optimal tuning for complex simulators. The method and system include initially building at least one RSM model having input and output terminals. Then there is provided a simulation-free optimization function by constructing an objective function from the outputs at ...


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Sharad Saxena, Purnendu K Mozumder, Gregory B Shinn, Kelly J Taylor: Controlling process modules using site models and monitor wafer control. Texas Instruments Incorporated, Bret J Petersen, James C Kesterson, Richard L Donaldson, May 12, 1998: US05751582 (52 worldwide citation)

A method is described for controlling a plurality of nonuniformity parameters in processing discrete products such as semiconductor wafers through a module consisting of several individual processes using site models. The method uses a controlled process to compensate for a subsequent uncontrolled p ...


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Sharad Saxena, Carlo Guardiani, Philip D Schumaker, Patrick D McNamara, Dale Coder: Efficient method for modeling and simulation of the impact of local and global variation on integrated circuits. PDF Solutions, Duane Morris, December 20, 2005: US06978229 (23 worldwide citation)

A computer implemented method for statistical modeling and simulation of the impact of global variation and local mismatch on the performance of integrated circuits, comprises the steps of: estimating a representation of component mismatch from device performance measurements in a form suitable for ...


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Sharad Saxena, Karthik Vasanth, Richard G Burch, Purnendu K Mozumder, Suraj Rao, Joseph C Davis: Design of microelectronic process flows for manufacturability and performance. Texas Instruments Incorporated, Carlton H Hoel, W James Brady, Frederick J Telecky Jr, October 30, 2001: US06311096 (21 worldwide citation)

A statistical design method is provided for minimizing the impact of manufacturing variations on semiconductor manufacturing by statistical design which seeks to reduce the impact of variability on device behavior. The method is based upon a Markov representation of a process flow which captures the ...


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Sharad Saxena, Patrick D McNamara, Carlo Guardiani, Lidia Daldoss: Methodology for the optimization of testing and diagnosis of analog and mixed signal ICs and embedded cores. PDF Solutions, Duane Morris, Steven E Koffs, February 21, 2006: US07003742 (13 worldwide citation)

A method for analyzing an integrated circuit (IC) having at least one of the group consisting of digital and analog components, where the IC is designed to meet a plurality of circuit performance specifications, and fabrication of the IC is monitored by measuring process factors and a previously def ...


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