1
Barrett E Cole, Bernard S Fritz, Robert D Horning: Fabry-Perot micro filter-detector. Honeywell, John G Shudy Jr, August 27, 1996: US05550373 (273 worldwide citation)

A monolithically constructed infrared, tunable Fabry-Perot cavity filter-detector for spectroscopic detection of particular substances having an absorption line in the wavelength range from 2 to 12 microns. The filter-detector has a hermetically sealed Fabry-Perot cavity that has a mirror which has ...


2
Cleopatra Cabuz, Robert D Horning, William R Herb: Polymer microactuator array with macroscopic force and displacement. Honeywell International, John G Shudy Jr, February 6, 2001: US06184608 (61 worldwide citation)

A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electro ...


3
Cleopatra Cabuz, Robert D Horning, William R Herb: Polymer microactuator array with macroscopic force and displacement. Honeywell International, John G Shudy Jr, July 3, 2001: US06255758 (46 worldwide citation)

A microactuator array device, which includes a plurality of generally parallel thin flexible polymer sheets bonded together in a predetermined pattern to form an array of unit cells on at least one layer. Thin conductive and dielectric films are deposited on the sheets to form a plurality of electro ...


4
G Benjamin Hocker, David W Burns, Akintunde I Akinwande, Robert D Horning, Amir R Mirza, Thomas G Stratton, Deidrich J Saathoff, James K Carney, Scott A McPherson: Diaphragm-based-sensors. March 22, 1994: US05295395 (29 worldwide citation)

The formation of diaphragms by silicon wafer bonding provides for a structure having at least two such diaphragms with cavities in the wafers to which the diaphragm layer is bonded. Passageways through the wafers provide for communication of a fluid to the diaphragms. In some locations less than all ...


5
Barrett E Cole, Subash Krishnankutty, Robert D Horning: Tunable optical filter. Honeywell International, Kris T Fredrick, November 9, 2004: US06816636 (26 worldwide citation)

A tunable filter having a top mirror, a bottom mirror, and one or more intervening layers. The one or more intervening layers preferably have a refractive index that changes with temperature. By heating the one or more intervening layers, the wavelength that is selected by the optical filter can be ...


6
G Benjamin Hocker, David W Burns, Akintunde I Akinwande, Robert D Horning, Amir R Mirza, Thomas G Stratton, Deidrich J Saathoff, James K Carney, Scott A McPherson: Method for making diaphragm-based sensors and apparatus constructed therewith. Honeywell, Ian D MacKinnon, November 4, 1997: US05683594 (26 worldwide citation)

This patent relates to the fabrication of diaphragm-based microstructures used primarily for sensing physical phenomena by detecting a change in deflection, resonance, or curvature of the diaphragm. The methods of fabrication described and claimed herein relate primarily to diaphragm-based diaphragm ...


7
Robert D Horning, Thomas G Stratton, Deidrich J Saathoff: Wafer bonding enhancement technique. Honeywell, Michael B Atlass, Paul H McDowall, John G Shudy Jr, June 7, 1994: US05318652 (15 worldwide citation)

Low temperature wafer bonding process enhancement makes a wafer surface hydrophobic, preparing it with a buffered oxide etchant and then exposing it to H.sub.2 O.sub.2 before thermoelectric bonding. Has particular application to diaphragm-based pressure sensor construction.


8
Robert D Horning, Mark W Weber, Burgess R Johnson: MEMS device with thinned comb fingers. Honeywell International, Gregory M Taylor, Fogg & Powers, August 21, 2007: US07258010 (14 worldwide citation)

Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a portion of their length relative to o ...


9
Robert D Horning, Jeffrey A Ridley: Systems for buried electrical feedthroughs in a glass-silicon MEMS process. Honeywell International, Matthew Luxton Esq, Armstrong Teasdale, May 3, 2005: US06888233 (14 worldwide citation)

A method for providing conductive paths into a hermetically sealed cavity is described. The sealed cavity is formed utilizing a silicon-glass micro-electromechanical structure (MEMS) process and the method includes forming recesses on a glass substrate everywhere that a conductive path is to pass in ...


10
Robert D Horning: Microactuator array with integrally formed package. Honeywell International, Kris T Fredrick, June 25, 2002: US06411013 (13 worldwide citation)

A microactuator array with an integrally formed package is disclosed. Because the package is made from the same material and at the same time as the actuator itself, no extra time or cost is associated with packaging. In addition, it is contemplated that the package may be configured to provide all ...



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