1
Leping Li, Steven George Barbee, Gary Richard Doyle, Arnold Halperin, Kevin L Holland, Francis Walter Kazak, Robert B Lipori, Anne Elizabeth McGuire, Rock Nadeau, William Joseph Surovic: Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool. International Business Machines Corporation, Alison D Mortinger, September 2, 1997: US05663637 (20 worldwide citation)

Rotary signal coupling in in-situ monitoring of a chemical-mechanical polishing process. A sensor fixed to a rotatable wafer carrier for creating a signal responsive to the chemical mechanical polishing process is coupled to a bottom half of a rotary transformer fixed to a rotating portion of the po ...


2
Leping Li, James A Gilhooly, Robert B Lipori, Clifford O Morgan III, William J Surovic, Cong Wei: Accumulator for slurry sampling. International Business Machines Corporation, Jay H Anderson, January 23, 2001: US06176765 (1 worldwide citation)

A fluid collection apparatus having an accumulator for contacting a polishing surface of a polishing pad and collecting fluid from the polishing pad, a reservoir for receiving fluid from the accumulator, and a volume maintainer for maintaining a set volume of fluid in the reservoir.