1
Qingsu Wang, Gerald Barnett, R Michael Greig, Yi Cheng: System and method for performing real time data acquisition, process modeling and fault detection of wafer fabrication processes. Advanced Micro Devices, Kevin L Conley Rose & Tayon Daffer, January 12, 1999: US05859964 (175 worldwide citation)

A system and method for detecting faults in wafer fabrication process tools by acquiring real-time process parameter signal data samples used to model the process performed by the process tool. The system includes a computer system including a DAQ device, which acquires the data samples, and a fault ...


2
Qingsu Wang, John Zvonar, Mike Simpson: E10 reporting tool. Advanced Micro Devices, Merchant Gould Smith Edell Welter & Schmidt P A, April 14, 1998: US05740429 (86 worldwide citation)

Method and system for automatically and accurately generating E10 reports based on a user-selected set of parameters, including date range, equipment and other parameters, are disclosed. In a preferred embodiment, the system of the present invention performs three primary functions; namely, a mappin ...


3
Elfido Coss Jr, Qingsu Wang, Terrence J Riley: Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework. Advanced Micro Devices, Williams Morgan & Amerson P C, April 20, 2004: US06725402 (45 worldwide citation)

A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A f ...


4
Glen W Scheid, Terrence J Riley, Qingsu Wang, Michael Miller, Si Zhao J Qin: Lot-to-lot rapid thermal processing (RTP) chamber preheat optimization. Advanced Micro Devices, Timothy M Honeycutt, July 31, 2001: US06268270 (38 worldwide citation)

Methods of optimizing a preheat recipe for rapid thermal processing workpieces are provided. In one aspect, a method of manufacturing is provided that includes preheating a rapid thermal processing chamber according to a preheating recipe and processing a first plurality of workpieces in the rapid t ...


5
Thomas Sonderman, Elfido Coss Jr, Qingsu Wang: Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework. Advanced Micro Devices, Williams Morgan & Amerson, April 8, 2003: US06546508 (38 worldwide citation)

A method and apparatus for providing fault detection in an Advanced Process Control (APC) framework. A first interface receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the first interface to a fault detection unit. A f ...


6
Michael Lee Miller, Qingsu Wang, Elfido Coss Jr: Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework. Advanced Micro Devices, Williams Morgan & Amerson, March 11, 2003: US06532555 (37 worldwide citation)

A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool rel ...


7
Qingsu Wang, Craig William Christian, John B Crowley, Denver L Dolman: System and method for calculating cluster tool performance metrics using a weighted configuration matrix. Advanced Micro Devices, Kevin L Daffer, Robert C Conley Rose & Tayon Kowert, June 22, 1999: US05914879 (22 worldwide citation)

A system and method for calculating the performance of a cluster tool using a weighted configuration matrix. The system includes a computer system which maintains a database of entities corresponding to semiconductor wafer processing modules in a fab. A user "clusters" the entities, i.e., selects en ...


8
Terrence J Riley, Qingsu Wang, Michael R Conboy, Michael L Miller, W Jarrett Campbell: Wafer-less qualification of a processing tool. Advanced Micro Devices, Williams Morgan & Amerson P C, September 30, 2003: US06629012 (21 worldwide citation)

A metbod for perforning a wafer-less qualification of a processing tool includes creating a wafer-less qualification model for the processing tool. Qualification data is generated from the processing tool iiiring a wafer-less qualification process. The qualification data is compared with the wafer-l ...


9
Michael L Miller, Qingsu Wang: Method and apparatus for updating a manufacturing model based upon fault data relating to processing of semiconductor wafers. Advanced Micro Devices, Williams Morgan & Amerson P C, April 29, 2003: US06556959 (11 worldwide citation)

The present invention provides a method and apparatus for performing automated development and updating of a manufacturing model for a manufacturing process. An initial manufacturing model is developed. Tolerances of the manufacturing model are expanded using additional production data. The manufact ...


10
Michael L Miller, Terrence J Riley, Qingsu Wang: Method and apparatus for fault model analysis in manufacturing tools. Advanced Micro Devices, Williams Morgan & Amerson P C, February 24, 2004: US06697691 (9 worldwide citation)

The present invention provides for a method and an apparatus for fault model analysis in manufacturing tools. A sequence of semiconductor devices is processed through a manufacturing process. Production data resulting from the processing of the semiconductor devices is acquired. A fault model analys ...



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