1
Petrus Carolus Maria Frissen, Johan Cornelia Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobus Matheus Coolen: Displacement device. Koninklijke Philips Electronics, Aaron Waxler, January 25, 2005: US06847134 (142 worldwide citation)

Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The m ...


2
Johan Cornelis Compter, Petrus Carolus Maria Frissen, Jan Van Eijk: Displacement device. Koninklijke Philips Electronics, Larry Liberchuk, May 24, 2011: US07948122 (9 worldwide citation)

Especially for use in the semiconductor industry, a displacement device (701) is disclosed comprising a first part comprising a carrier (714) on which a system of magnets (710) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respective ...


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Petrus Carolus Maria Frissen, Johan Cornelis Compter, Rob Tabor: Lithographic apparatus and device manufacturing method. ASML Netherlands, Pillsbury Winthrop, May 10, 2005: US06891600 (4 worldwide citation)

A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.


5
Henricus Wilhelmus Aloysius Janssen, Johannes Petrus Martinus Bernardus Vermeulen, Fransiscus Marinus Andrea Maria Van Gaal, Petrus Carolus Maria Frissen: Band coil. Koninklijke Philips Electronics, Aaron Waxler, August 9, 2005: US06926588 (2 worldwide citation)

The invention relates to a method of manufacturing a band coil by means of a material-removing process performed on the coils so as to obtain a band coil which has a profile in the direction of the coil axis. Such a process may be a discharge process, an etching process or a mechanical grinding proc ...


6
Johan Cornelis Compter, Petrus Carolus Maria Frissen: Displacement device. Koninklijke Philips Electronics, Aaron Waxler, December 17, 2002: US06496093 (2 worldwide citation)

Positioning device with a first part and a second part which are movable relative to each other in at least one direction. Said first part comprises a carrier on which a system of magnets with N and Z magnets are arranged in an alternating manner and having a flux density B(x)=B(x+2&tgr; ...


7
Henricus Wilhelmus Aloysius Janssen, Johannes Petrus Martinus Bernardus Vermeulen, Fransiscus Marinus Andrea Maria Van Gaal, Petrus Carolus Maria Frissen: Band coil. Michael E Marion, US Philips Corporation, June 27, 2002: US20020079775-A1 (2 worldwide citation)

The invention relates to a method of manufacturing a band coil by means of a material-removing process performed on the coils so as to obtain a band coil which has a profile in the direction of the coil axis. Such a process may be a discharge process, an etching process or a mechanical grinding proc ...


8
Petrus Carolus Maria Frissen, Gerardus Lucien Mathildus Jansen, George Arie Jan De Fockert: Lithographic apparatus and device manufacturing method. ASML NETHERLANDS, Pillsbury Winthrop Shaw Pittman, September 11, 2018: US10073358

A magnetization tool for post-assembly magnetization of a magnet assembly including a main coil, an end surface of the main coil configured to be positioned substantially parallel to an outer surface of the magnet assembly for magnetizing a magnetic pole of the magnet assembly, the main coil being c ...


9
Petrus Carolus Maria Frissen, Johan Cornelis Compter, Michael Josepha Mathijs Renkens, George Arie Jan De Fockert, Rob Jacobus Matheus Coolen: Displacement device. Koninklijke Philips Electronics, Corporate Patent Counsel, US Philips Corporation, June 27, 2002: US20020079888-A1

Positioning device having a first part (1) which is movable relative to a second part (2) in a X and Y-direction, said first part (1) comprising a carrier (5) on which a system of magnets (3) is arranged in a pattern of rows (7) and columns (8) parallel to the X- and Y-direction, respectively. The m ...


10
Petrus Carolus Maria Frissen, Johan Cornelis Compter, Rob Tabor: Lithographic apparatus and device manufacturing method. Asml Netherlands, Pillsbury Winthrop, February 26, 2004: US20040036848-A1

A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting layer.