1
Alan D Brodie, Curt Chadwick, Anil Desai, Hans Dohse, Dennis Emge, John Greene, Ralph Johnson, Ming Yie Ling, John McMurtry, Barry Becker, Ray Paul, Mike Robinson, Richard Simmons, David E A Smith, John Taylor, Lee Veneklasen, Dean Walters, Paul Wieczorek, Sam Wong, April Dutta, Surendra Lele, Kirkwood Rough, Henry Pearce Percy, Jack Y Jau, Chun C Lin, Hoi T Nguyen, Yen Jen Oyang, Timothy L Hutcheson, David J Clark, Chung Shih Pan, Chetana Bhaskar, Chris Kirk, Eric Munro: Electron beam inspection system and method. KLA Instruments Corporation, Allston L Jones, March 26, 1996: US05502306 (177 worldwide citation)

There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least o ...


2
David Soltz, Paul Wieczorek, Aaron Zuo, Gabor Toth: Systems and methods for reducing alteration of a specimen during analysis for charged particle based and other measurement systems. KLA Tencor Technologies, Baker & McKenzie, July 1, 2008: US07394067 (26 worldwide citation)

Systems and methods for reducing alteration of a specimen during by charged particle based and other measurements systems are provided. One system configured to reduce alteration of a specimen during analysis includes a vacuum chamber in which the specimen is disposed during the analysis and an elem ...


3
Thomas Allen Sumrak, David Paul Wieczorek: Electronic compensator for a piezoelectric actuator. Siemens Automotive Corporation, June 4, 2002: US06400066 (6 worldwide citation)

A fuel injector comprises a tube assembly, a stem assembly, and a plurality of sets of piezoelectric elements. The tube assembly includes a seat defining an opening through which fuel enters an internal combustion engine. The stem assembly includes a cap and a stem that are relatively movable with r ...


4
Thomas Allen Sumrak, David Paul Wieczorek: Electronic compensator for a piezoelectric actuator. Siemens Automotive Corporation, November 18, 2003: US06650032 (2 worldwide citation)

A fuel injector comprises a tube assembly, a stem assembly, and a plurality of sets of piezoelectric elements. The tube assembly includes a seat defining an opening through which fuel enters an internal combustion engine. The stem assembly includes a cap and a stem that are relatively movable with r ...


5
Thomas Allen Sumrak, David Paul Wieczorek: Electronic compensator for a piezoelectric actuator. Siemens Automotive Corporation, Morgan Lewis & Bockius, December 26, 2002: US20020195904-A1

A fuel injector comprises a tube assembly, a stem assembly, and a plurality of sets of piezoelectric elements. The tube assembly includes a seat defining an opening through which fuel enters an internal combustion engine. The stem assembly includes a cap and a stem that are relatively movable with r ...