1
Warren K Harwood, Martin J Koxxy, Paul A Tervo: Wafer probe station with integrated environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, November 30, 1993: US05266889 (119 worldwide citation)

A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclo ...


2
Randy J Schwindt, Warren K Harwood, Paul A Tervo: Wafer probe station having full guarding. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, October 10, 1995: US05457398 (111 worldwide citation)

A probe station includes a fully guarded chuck assembly and connector mechanism for increasing sensitivity to low-level currents while reducing settling times. The chuck assembly includes a wafer-supporting first chuck element surrounded by a second chuck element having a lower component, skirting c ...


3
Paul A Tervo, Clarence E Cowan: Low-current pogo probe card. Kevin L Chernoff Vilhauer McClung & Stenzel Russell, March 7, 2000: US06034533 (109 worldwide citation)

A low-current pogo probe card for measuring currents down to the femtoamp region includes a laminate board having a layer of conductive traces interposed between two dielectric layers. A plurality of probing devices, such as ceramic blades, are edge-mounted about a central opening so that the probin ...


4
Randy J Schwindt, Warren K Harwood, Paul A Tervo, Kenneth R Smith, Richard H Warner, Peter D Andrews: Wafer probe station having integrated guarding, Kelvin connection and shielding systems. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, September 6, 1994: US05345170 (97 worldwide citation)

A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chu ...


5
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, March 7, 2006: US07009383 (94 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


6
Randy J Schwindt, Warren K Harwood, Paul A Tervo, Kenneth R Smith, Richard H Warner: Wafer probe station for low-current measurements. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, May 15, 2001: US06232788 (89 worldwide citation)

A wafer probe station adapted for low-current measurements provides electrically active upper and lower chuck assembly elements where air gaps are provided between a major portion of either a lower or nonlower surface on the upper chuck assembly element and a corresponding conductive surface on or c ...


7
Randy J Schwindt, Warren K Harwood, Paul A Tervo, Kenneth R Smith, Richard H Warner: Wafer probe station for low-current measurements. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, September 2, 1997: US05663653 (66 worldwide citation)

A wafer probe station adapted for low-current measurements provides electrically active upper and lower chuck assembly elements where air gaps are provided between a major portion of either a lower or nonlower surface on the upper chuck assembly element and a corresponding conductive surface on or c ...


8
Paul A Tervo, Kenneth R Smith, Clarence E Cowan, Mike P Dauphinais, Martin J Koxxy: Membrane probing system. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, August 16, 2005: US06930498 (63 worldwide citation)

A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal con ...


9
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, July 2, 1996: US05532609 (62 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


10
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, February 18, 1997: US05604444 (56 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...