1
Makoto Aritsuka, Naruyuki Iwanaga: Method for purifying nitrogen trifluoride gas. Mitsui Toatsu Chemicals Incorporated, Fisher Christen & Sabol, June 12, 1990: US04933158 (68 worldwide citation)

There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermall ...


2
Hiroyuki Hyakutake, Isao Harada, Naruyuki Iwanaga, Toshihiko Nishitsuji: Method of liquefying and condensing nitrogen trifluoride and a method of purifying nitrogen trifluoride. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, December 4, 1990: US04975259 (16 worldwide citation)

The present invention has as its technical theme to provide a liquefactive and condensable method that enables the reaction step of forming NF.sub.3 to be operated safely and continuously and purifying method that eliminates O.sub.2, N.sub.2, etc. in NF.sub.3.


3
Isao Harada, Yukihiro Yoda, Naruyuki Iwanaga, Toshihiko Nishitsuji, Akio Kikkawa: Method for preparing gaseous metallic fluoride. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, October 2, 1990: US04960581 (7 worldwide citation)

The method for preparing a gaseous metallic floride is here disclosed which comprises reacting a metal or its oxide with a fluorine gas or nitrogen trifluoride gas, the aforesaid method being characterized by comprising the steps of mixing the metal or its oxide with a molding auxiliary comprising a ...


4
Nobuhiko Koto, Toshihiko Nishitsuji, Naruyuki Iwanaga, Isao Harada: Process for purifying nitrogen trifluoride gas. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, December 25, 1990: US04980144 (7 worldwide citation)

This invention relates to a process for obtaining a high purity nitrogen trifluoride gas which is used as a dry etching agent for semiconductors or a cleaning gas for CVD apparatus, etc., particularly to a process for removing oxygen difluoride. This is a process for purifying a nitrogen trifluoride ...


5
Naruyuki Iwanaga, Tosiaki Yamaguti, Nobuhiko Fujieda, Yoshihiro Tsuzikawa, Isao Harada: Electrolytic cell. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, January 28, 1992: US05084156 (5 worldwide citation)

An electrolytic cell for the production of a nitrogen trifluoride gas by a molten salt electrolysis comprises electrodes, partition plates, bottom surface, liquid surface of an electrolytic bath and lids, at least some of these members being in a particular distance relationship.


6
Naruyuki Iwanaga, Tosiaki Yamaguti, Nobuhiko Fujieda, Yoshihiro Tsuzikawa: Electrolytic cell. Mitsui Toatsu Chemicals, Fisher Christen & Sabol, February 4, 1992: US05085752 (4 worldwide citation)

An electrolytic cell for the production of a nitrogen trifluoride gas by a molten salt electrolysis comprises electrodes, partition plates, bottom surface, liquid surface of an elecrolytic bath and lids, at least some of these members being in a particular distance relationship.