1
Steven B Herschbein, Narender Rana, Chad Rue, Michael R Sievers: Ion detector for ion beam applications. International Business Machines Corporation, Lisa U Jaklitsch, October 10, 2006: US07119333 (19 worldwide citation)

Detection of weak ion currents scattered from a sample by an ion beam is improved by the use of a multiplier system in which a conversion electrode converts incident ions to a number of secondary electrons multiplied by a multiplication factor, the secondary electrons being attracted to an electron ...


2
Herschel M Marchman, Steven B Herschbein, Chad Rue, Michael Renner, Narender Rana: High-resolution optical channel for non-destructive navigation and processing of integrated circuits. International Business Machines Corporation, Todd M C Li, April 1, 2008: US07351966 (8 worldwide citation)

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion in ...


3
Habib Hichri, Ahmad D Katnani, Kaushik A Kumar, Narender Rana, Richard S Wise, Hakeem B S Akinmade Yusuff: Liner protection in deep trench etching. International Business Machines Corporation, Cantor Colburn, Ian MacKinnon, October 4, 2011: US08030157 (2 worldwide citation)

A method of forming a trench in a semiconductor device formed of a substrate and a first layer formed over the substrate includes forming an initial trench that passes through the first layer to the substrate, the initial trench having a diameter that decreases from a first diameter to a second diam ...


4
Taher E Kagalwala, Narender Rana, Yunlin Zhang: System and method for estimating spatial characteristics of integrated circuits. GlobalFoundries, Anthony J Canale, Hoffman Warnick, February 16, 2016: US09262819

Methods of the present disclosure can include a method for estimating a spatial characteristic of an integrated circuit (IC), the method comprising: calculating a correlation between a dimension of a photoresist layer and exposure to a scanning electron microscope (SEM) for at least one reference IC ...


5
Steven B Herschbein, Herschel M Marchman, Narender Rana, Chad Rue: In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques. International Business Machines Corporation, DeLio & Peterson, Kelly M Nowak, Ian D MacKinnon, August 24, 2010: US07781733

An apparatus for simultaneous parallel processing of a sample using light energy for optical viewing or surface processing in parallel with a charged particle beam. A charged particle beam transmits a focused ion beam or an electron beam along a path to a sample. An optical microscope transmits ligh ...


6
Steven B Herschbein, Herschel M Marchman, Narender Rana, Chad Rue: In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (fib and sem) techniques. International Business Machines Corporation, Law Office Of Delio & Peterson, November 20, 2008: US20080283777-A1

An apparatus for simultaneous parallel processing of a sample using light energy for optical viewing or surface processing in parallel with a charged particle beam. A charged particle beam transmits a focused ion beam or an electron beam along a path to a sample. An optical microscope transmits ligh ...


7
Herschel M Marchman, Steven B Herschbein, Chad Rue, Michael Renner, Narender Rana: High-resolution optical channel for non-destructive navigation and processing of integrated circuits. International Business Machines Corporation, International Business Machines Corporation, Dept 18g, March 20, 2008: US20080067369-A1

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion in ...


8
Steven B Herschbein, Narender Rana, Chad Rue, Michael R Sievers: Improved ion detector for ionbeam applications. International Business Machines Corporation, International Business Machines Corporation, Dept 18g, May 11, 2006: US20060097159-A1

Detection of weak ion currents scattered from a sample by an ion beam is improved by the use of a multiplier system in which a conversion electrode converts incident ions to a number of secondary electrons multiplied by a multiplication factor, the secondary electrons being attracted to an electron ...


9
Herschel M Marchman, Steven Brett Herschbein, Rue Chad, Michael Renner, Narender Rana: Non-destructive navigation for integrated circuit, and high-resolution optical channel for processing. Internatl Business Mach Corp &Lt IBM&Gt, December 6, 2007: JP2007-316072

PROBLEM TO BE SOLVED: To provide an optical channel system for an optical fiber included in an ion/electron beam tool for imaging or processing an integrated circuit, or for executing both.SOLUTION: This optical channel system includes an image collecting portion, an optical fiber image transmitting ...



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