1
Tadahiro Ohmi, Michio Yamaji, Nobukazu Ikeda, Masayuki Hatano, Kosuke Yokoyama, Shigeaki Tanaka: Shutoff-opening devices and fluid control apparatus comprising such devices. Tadahiro Ohmi, Fujikin Incorporated, Armstrong Westerman Hattori McLeland and Naughton, March 14, 2000: US06035893 (69 worldwide citation)

A valve main body is internally formed with a main channel extending from a rear end face thereof nearly to a first valve actuator, and two subchannels communicating with the main channel via second and third valve actuators, respectively. The valve main body has a slanting face extending forwardly ...


2
Tadahiro Ohmi, Keiji Hirao, Yukio Minami, Michio Yamaji, Takashi Hirose, Nobukazu Ikeda: Fluid control device. Tadahiro Ohmi, Fujikin Incorporated, Armstrong Westerman Hattori McLeland & Naughton, July 10, 2001: US06257270 (58 worldwide citation)

A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is pas ...


3
Tadahiro Ohmi, Keiji Hirao, Yukio Minami, Michio Yamaji, Takashi Hirose, Nobukazu Ikeda: Fluid control device. Tadahiro Ohmi, Fujikin Incorporated, Armstrong Westerman Hattori McLeland and Naughton, November 2, 1999: US05975112 (58 worldwide citation)

A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is pas ...


4
Yukio Minami, Nobukazu Ikeda, Michio Yamaji, Tsutomu Tanigawa: Device for heating fluid controller. Fujikin Incorporated, Armstrong Westerman Hattori McLeland & Naughton, May 9, 2000: US06060691 (58 worldwide citation)

A device for heating a fluid controller comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an insulating layer provided between each heater and each side face, a pair of side holding members each having a reces ...


5
Tadahiro Ohmi, Keiji Hirao, Michio Yamaji, Shigeru Itoi, Tsutomu Shinohara, Nobukazu Ikeda, Hiroshi Morokoshi, Tetsuya Kojima: Fluid control apparatus. Fujikin Incorporated, Armstrong Westerman Hattori McLeland & Naughton, June 23, 1998: US05769110 (34 worldwide citation)

A fluid control apparatus comprises a mass flow controller, two on-off valves disposed at the inlet side of the controller and three on-off valves disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve is positioned on a purge fluid on-off valve, and at the outle ...


6
Tadahiro Ohmi, Tetu Kagazume, Kazuhiko Sugiyama, Ryousuke Dohi, Tomio Uno, Kouji Nishino, Hiroyuki Fukuda, Nobukazu Ikeda, Michio Yamaji: Pressure-type flow rate control apparatus. Fujikin Incorporated, Tadahiro Ohmi, Tokyo Electron, Griffin & Szipl P C, November 28, 2000: US06152168 (32 worldwide citation)

A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduction of the p ...


7
Tadahiro Ohmi, Michio Yamaji, Tsutomu Shinohara, Shigeru Itoi, Keiji Hirao, Yuji Kawano, Shigeaki Tanaka, Kosuke Yokoyama, Hiroshi Morokoshi, Nobukazu Ikeda: Couplings for fluid controllers. Tadahiro Ohmi, Fujikin Incorporated, Armstrong Westerman Hattori McLeland & Naughton, March 21, 2000: US06039360 (31 worldwide citation)

A coupling comprises a holding member having a U-shaped cross section, and a channel member held by the holding member. The holding member has an upper wall formed with screw bores for use in attaching the holding member to a fluid controller. The channel member comprises a body having an inner chan ...


8
Michio Yamaji, Kenji Yamamoto: Fluid flow-controller with improved diaphragm. Masako Kiyohara, Griffin Butler Whisenhunt & Kurtossy, March 22, 1994: US05295662 (30 worldwide citation)

A diaphragm type fluid flow controller comprises a valve body having formed therein an inlet and an outlet passage, the passages communicating with a valve chamber formed in the valve body. The valve chamber is sealed by a flexible diaphragm. A threaded valve stem is rotated by a handle to cause pre ...


9
Tadahiro Ohmi, Michio Yamaji, Naoya Masuda, Takashi Hirose, Kosuke Yokoyama, Nobukazu Ikeda: Fluid control apparatus. Fujikin, Armstrong Westerman Hattori McLeland & Naughton, August 14, 2001: US06273139 (30 worldwide citation)

A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed between the ...


10
Tadahiro Ohmi, Yuji Kawano, Keiji Hirao, Hisashi Tanaka, Naoya Masuda, Yukio Minami, Masayuki Hatano, Shigeaki Tanaka, Michio Yamaji, Hiroshi Morokoshi, Michio Kuramochi, Nobukazu Ikeda, Shigeru Itoi, Michihiro Kashiwa: Shutoff-opening device. Tadahiro Ohmi, Fujikin, Armstrong Westerman Hattori McLeland & Naughton, November 16, 1999: US05983933 (29 worldwide citation)

A valve mount having two valves removably installed thereon from above as arranged in a direction comprises an inflow channel forming member having a channel in communication with an inlet of the valve disposed at one end thereof, a communication channel forming member having a channel for causing a ...



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