1
Richard W Jarvis, Iraj Emami, John L Nistler, Michael G McIntyre: Multipurpose defect test structure with switchable voltage contrast capability and method of use. Advanced Micro Devices, Kevin L Daffer, Conley Rose & Tayon P C, October 2, 2001: US06297644 (89 worldwide citation)

A test structure which includes alternating grounded and floating conductive lines may be used to test the formation of conductive features on an integrated circuit topography. During irradiation of the conductive lines from an electron source, the grounded conductive lines will appear darker than t ...


2
Richard W Jarvis, Michael G McIntyre: Integrated defect monitor structures for conductive features on a semiconductor topography and method of use. Advanced Micro Devices, Kevin L Daffer, Conley Rose & Tayon P C, March 26, 2002: US06362634 (21 worldwide citation)

A test structure which includes a first conductive feature layer and a second conductive feature layer is described. The first conductive feature layer includes a first conductive line. The second conductive feature layer includes a second conductive line. A daisy chain conductive feature is also in ...


3
Michael G McIntyre, James E Morris: Universal spatial pattern recognition system. Advanced Micro Devices, Hamilton & Terrile, Gary W Hamilton, September 12, 2006: US07106897 (7 worldwide citation)

A method and apparatus for analyzing patterns in semiconductor wafers wherein the patterns are compared to a plurality of patterns stored in a common pattern library. A spatial pattern recognition engine is operable to receive a first set of data corresponding to a pattern on a semiconductor wafer a ...


4
Michael G McIntyre, Kevin R Lensing: Determining die test protocols based on process health. GLOBALFOUNDRIES, Williams Morgan & Amerson P C, October 18, 2011: US08041518 (5 worldwide citation)

A method includes receiving a first set of parameters associated with a subset of a plurality of die on a wafer. A die health metric is determined for at least a portion of the plurality of die based on the first set of parameters. The die health metric includes at least one process component associ ...


5
Michael Alan Retersdorf, Michael G McIntyre: Method and apparatus for identifying outlier data. Advanced Micro Devices, Williams Morgan & Amerson P C, May 12, 2009: US07533313 (5 worldwide citation)

A method for converting data includes generating a first data vector of data measurements related to processing of at least one workpiece. Each element of the first data vector is associated with at least one of a plurality of positions on the workpiece. A cumulative distribution of the elements in ...


6
Michael G McIntyre, Alex Bierwag, Charlie Reading, Alfredo V Herrera: Method and apparatus for manufacturing data indexing. Advanced Micro Devices, Williams Morgan & Amerson P C, September 1, 2009: US07583833 (2 worldwide citation)

A method, apparatus, and a system for generating an index for storing data. A pattern associated with a first set of data is determined. The first set of data is stored. A determination is made as to whether the pattern associated with a second set of data corresponds to the pattern associated with ...


7
Richard Wayne Jarvis, Michael G McIntyre: Split manufacturing method for advanced semiconductor circuits. Advanced Micro Devices, March 27, 2007: US07195931 (1 worldwide citation)

A front-end-of-line piece of a semiconductor die is manufactured in a first manufacturing line. A back-end-of-line piece of a semiconductor die is manufactured using a second manufacturing line, which will typically be different than the first manufacturing line. The front-end-of-line piece and the ...


8
Michael G McIntyre, Zhuqing Zong, Andrew Drozda Freeman, Vijay Sankaran: Method and apparatus for implementing a universal coordinate system for metrology data. Advanced Micro Devices, Williams Morgan & Amerson P C, May 26, 2009: US07539552 (1 worldwide citation)

A method includes receiving a metrology report including metrology data collected by a metrology tool, position data associated with the metrology data, and context data associated with the metrology tool. A first coordinate system employed by the metrology tool is determined based on the context da ...


9
Michael G McIntyre, Michael A Retersdorf: Method and apparatus for analysis of continuous data using binary parsing. Advanced Micro Devices, Williams Morgan & Amerson P C, March 1, 2011: US07899634 (1 worldwide citation)

A method, apparatus, and a system for generating a binary mapping of wafer regions using measured value. A first measured value relating to processing a first workpiece is acquired. A second measured value relating to a second workpiece is acquired. At least a first region common to the first and se ...


10
Michael G McIntyre: Method and apparatus for relative testing of integrated circuit devices. Globalfoundries, Williams Morgan & Amerson P C, May 4, 2010: US07710137

A method includes loading a plurality of integrated circuit devices into a tester. At least one parameter is determined for each of the integrated circuit devices using the tester. At least one relative acceptance criterion associated with the parameter is determined based on the determined paramete ...