1
Haibin Zhang, Fang Shan, Mathew Rekow, Min Zhang, Glenn Simenson, Qian Xu, James Brookhyser, Joe Frankel, Michael Darwin, Jack Rundel, Matthew Pysher: Method and apparatus for separation of workpieces and articles produced thereby. Electro Scientific, April 4, 2017: US09610653

The present invention is a method for separating a workpiece from a common substrate. It includes the steps of providing the workpiece, generating, within a beam source, a beam of laser pulses configured to modify a portion of the workpiece, determining a depth for creating a modified region based u ...


2
Robert Reichenbach, Mehmet Alpay, Michael Darwin, Jeffrey Howerton: Interactive control system, methods of making the same, and devices incorporating the same. ELECTRO SCIENTIFIC, September 1, 2015: US09120180

Numerous embodiments of interactive control systems, methods of making the same, and devices incorporating the same are disclosed. In one embodiment, a system includes a light-resistant material; light-transmissive holes penetrating in a light-transmissive pattern through the light resistant materia ...


3
Robert Gregory Wolf, Michael Darwin: Molecular airborne contaminants (MACs) film removal and wafer surface sustaining system and method. Rudolph Technologies, Harrington & Smith, May 12, 2005: US20050098264-A1

A MACs mitigation system includes a MACs film removal sub-system (14) and a wafer surface sustaining sub-system (16) for sustaining or maintaining the cleaned surface (18A) of a wafer (18) in a substantially MACs-free condition for some predetermined period of time, such as the typical amount of tim ...