1
Kaigham J Gabriel, Mehran Mehregany, James A Walker: Thin film shape memory alloy and method for producing. American Telephone and Telegraph Company AT&T Bell Laboratories, Jerry W Herndon, September 12, 1989: US04864824 (395 worldwide citation)

An actuator including a device made of thin film shape memory material mounted to a substrate. The thin film device is deformed from its original shape. Thereafter, the device is heated to restore the device to its original shape. Motion of the device occurs in the deforming and restoring steps, whi ...


2
Robert Y Loo, Adele Schmitz, Julia Brown, Jonathan Lynch, Debabani Choudhury, James Foschaar, Daniel J Hyman, Brett Warneke, Juan Lam, Tsung Yuan Hsu, Jae Lee, Mehran Mehregany: Design and fabrication of broadband surface-micromachined micro-electro-mechanical switches for microwave and millimeter-wave applications. Hughes Electronics Corporation, Rosemont Aerospace, V D Duraiswamy, M W Sales, April 4, 2000: US06046659 (218 worldwide citation)

Methods for the design and fabrication of micro-electro-mechanical switches are disclosed. Two different switch designs with three different switch fabrication techniques are presented for a total of six switch structures. Each switch has a multiple-layer armature with a suspended biasing electrode ...


3
Roger T Howe, Jeffrey H Lang, Martin F Schlecht, Martin A Schmidt, Stephen D Senturia, Mehran Mehregany, Lee S Tavrow: Method for fabricating side drive electrostatic micromotor. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, August 27, 1991: US05043043 (75 worldwide citation)

An electrostatic micromotor employs a side drive design. The stator operates in a plane above a substract and a moveable member lies and moves in the plane of the stator. An electrostatic field of operational strength is generated and sustained without breakdown in the plane between the stator and e ...


4
Joseph H Haritonidis, Stephen D Senturia, David J Warkentin, Mehran Mehregany: Optical micropressure transducer. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, May 22, 1990: US04926696 (41 worldwide citation)

A thin diaphragm receives pressure across one side and faces a beam splitter on the other side. The beam splitter is integrally attached to the diaphragm and serves as a local optical reference plane for the entire assembly. Coherent light from a light source is partially reflected at the beam split ...


5
Mehran Mehregany, Christian A Zorman, Xiao An Fu, Jeremy L Dunning: Silicon carbide and other films and method of deposition. FLX Micro, August 28, 2007: US07261919 (39 worldwide citation)

A method of depositing a ceramic film, particularly a silicon carbide film, on a substrate is disclosed in which the residual stress, residual stress gradient, and resistivity are controlled. Also disclosed are substrates having a deposited film with these controlled properties and devices, particul ...


6
Joseph H Haritonidis, Stephen D Senturia, David J Warkentin, Mehran Mehregany: Pressure transducer apparatus. Massachusetts Institute of Technology, Hamilton Brook Smith & Reynolds, July 24, 1990: US04942767 (32 worldwide citation)

A micromachined diaphragm is positioned across a gap from an end of an optic fiber. The optic fiber and the diaphragm are integrally mounted. The end of the optic fiber provides a local reference plane which splits light carried through the fiber toward the diaphragm. The light is split into a trans ...


7
Mehran Mehregany, Christopher A Bang, Kevin C Stark: Fracture-resistant micromachined devices. Rosemount Aerospace, Thompson Hine & Flory, January 9, 2001: US06171972 (30 worldwide citation)

A method for forming micromachined devices out of a polycrystalline silicon substrate using deep reactive ion etching to form the micromachined device. The method comprises the steps of providing a bulk material substrate of polycrystalline silicon, and etching the bulk material using deep reactive ...


8
Mehran Mehregany: Microfabricated harmonic side-drive motors. Massachusetts Institute of Technology, Wolf Greenfield & Sacks, March 3, 1992: US05093594 (24 worldwide citation)

A microfabricated, harmonic side-drive "wobble" type micromotor exhibiting increased torque output without the need for air levitation or for insulation on the rotor. Stator pieces are arranged about a circular space. In the center of that space is a bearing. An annular rotor in the space, about the ...


9
Mehran Mehregany: Three-axis accelerometers and fabrication methods. Qualtre, Burns & Levinson, Bruce D Jobse Esq, February 22, 2011: US07892876 (21 worldwide citation)

Disclosed are MEMS accelerometers and methods for fabricating same. An exemplary accelerometer comprises a substrate, and a proof mass that is a portion of the substrate and which is separated from the substrate surrounding it by a gap. An electrically-conductive anchor is coupled to the proof mass, ...


10
Mehran Mehregany, Kenneth G Goldman, Vijayakumar R Dhuler: Micromechanical memory sensor. Case Western Reserve University, Fay Sharpe Beall Fagan Minnich & McKee, January 27, 1998: US05712609 (20 worldwide citation)

A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the s ...