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Cox Henrikus Herman Marie, Mattaar Thomas Augustus: Method for positioning object by electrostatic motor, stage device, and lithographic equipment. Asml Netherlands, April 23, 2009: JP2009-089595

PROBLEM TO BE SOLVED: To provide a solution using a less calculation amount than conventional methods, even with at least a partial possibility for compensating pitch torque of an electromagnetic motor.SOLUTION: The method for positioning an object is performed by the electromagnetic motor generatin ...


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Hendriks Stefan Gertrud Marie, Mattaar Thomas Augustus, Leenheers Gerardus Jacobus Cornelis Catharina Maria: System and method for moving an object employing piezo actuators. Asml Netherlands, March 1, 2006: TWI250676

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


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De Jongh Robertus Johannes Marinus, Van Den Biggelaar Petrus Marinus Christianus Maria, Mattaar Thomas Augustus, Van de Ven Johannes Theodorus G M: Lithographic apparatus and device manufacturing method. Asml Netherlands, February 17, 2005: JP2005-045250

PROBLEM TO BE SOLVED: To reduce delay time for a controller of a lithographic apparatus including at least two series connected integrators and an output circuit for providing output quantity of the series connected integrators to get to an operation area when the controller is in a saturation area. ...


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Hendriks Stefan Gertrud Marie, Mattaar Thomas Augustus, Leenheers Gerardus Jacobus Cornelis Catharina Maria: System and method for moving an object employing piezo actuators. Asml Netherlands, October 1, 2005: TW200532955

A piezo actuator system, is presented herein. A piezo actuator system comprises a number of piezo actuators which may lengthen and shear. Using the lengthening and shearing, the piezo actuator system grips and moves an object in response to a first and a second control signal, respectively. The poss ...


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Hendriks Stefan Gertrud Marie, Mattaar Thomas Augustus, Leenheers Gerardus Jacobus Cornelis Catharina Maria: System and method for moving object employing piezo actuators to perform slow shuffle sequence. Asml Netherlands, June 21, 2005: KR1020040105581

PURPOSE: A piezo actuator system is provided to perform a slow shuffle sequence which is a relatively slowly performed shuffle sequence, while the linear shear sequence may be performed simultaneously, to prevent any dead time during movement. CONSTITUTION: A piezo actuator system is configured to p ...


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