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Akihiro Takanashi, Tatsuo Harada, Masamoto Akeyama, Yataro Kondo, Toshiei Kurosaki, Shinji Kuniyoshi, Sumio Hosaka, Yoshio Kawamura: Pattern forming apparatus. Hitachi, Antonelli Terry & Wands, November 6, 1984: US04480910 (907 worldwide citation)

There is disclosed a pattern forming apparatus for projecting a pattern which is formed on a reticle upon a photoresist layer on a substrate which comprises an illumination system for illuminating the pattern for forming an optical image, a reduction lenses for reducing the optical pattern image at ...


2
Masamoto Akeyama, Yoshifumi Tomita, Saburo Nonogaki: Pattern forming method and pattern forming apparatus using exposures in a liquid. Hitachi, Antonelli Terry & Wands, August 2, 1983: US04396705 (398 worldwide citation)

A pattern forming method comprising a step of disposing a substrate with a coated film of photosensitive composition and a mask having a predetermined pattern in a first liquid which does not dissolve said coated film of photosensitive composition, and a step of exposing said coated film to light th ...


3
Kuninori Imai, Soji Takahashi, Masamoto Akeyama: Method of manufacturing an article having a press-worked member inwardly of a cylindrical member. Hitachi, Craig and Antonelli, April 29, 1980: US04200217 (4 worldwide citation)

This invention relates to a method of manufacturing an article having a press-worked member inwardly of a cylindrical member, which comprises a first step for removing stain and oxidation film on the inner surface of a cylindrical member and on the peripheral side surface of a blank, a second step f ...


4