1
Masakatu Ohta, Akiyoshi Suzuki: Projection exposure apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, April 14, 1992: US05105075 (78 worldwide citation)

A projection exposure apparatus includes a projection optical system for projecting an image of a pattern of a first object to a second object, and an adjusting system for adjusting projection magnification and distortion of the projected image of the pattern, the adjusting system being operable to ...


2
Masakatu Ohta: Illuminating apparatus. Canon Kabushiki Kaisha, Fitzpatrick Cella Harper & Scinto, January 29, 1985: US04497013 (36 worldwide citation)

An illuminating apparatus is provided with an illuminating unit for forming a plurality of secondary light sources, the illuminating unit having a light source, a light converging device for converging photoenergy emitted from the light source, and a first multi-beam forming optical element for form ...