1
Warren K Harwood, Martin J Koxxy, Paul A Tervo: Wafer probe station with integrated environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, November 30, 1993: US05266889 (119 worldwide citation)

A wafer probe station is equipped with a compact, integrated controlled-environment enclosure providing EMI shielding, substantially hermetic sealing for a dry purge gas for low-temperature testing, and a dark environment. The sealing isolation of the wafer chuck and test probe provided by the enclo ...


2
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, March 7, 2006: US07009383 (94 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


3
Paul A Tervo, Kenneth R Smith, Clarence E Cowan, Mike P Dauphinais, Martin J Koxxy: Membrane probing system. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, August 16, 2005: US06930498 (63 worldwide citation)

A membrane probing assembly includes a probe card with conductors supported thereon, wherein the conductors include at least a signal conductor located between a pair of spaced apart guard conductors. A membrane assembly includes a membrane with contacts thereon, and supporting at least a signal con ...


4
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, July 2, 1996: US05532609 (62 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


5
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, February 18, 1997: US05604444 (56 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


6
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, November 6, 2001: US06313649 (54 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


7
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, November 26, 2002: US06486687 (50 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


8
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, October 21, 2003: US06636059 (50 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


9
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, April 30, 2002: US06380751 (50 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...


10
Warren K Harwood, Paul A Tervo, Martin J Koxxy: Wafer probe station having environment control enclosure. Cascade Microtech, Chernoff Vilhauer McClung & Stenzel, October 5, 2004: US06801047 (48 worldwide citation)

A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and ...