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Mark W Miles: Interferometric modulation. Etalon, Fish & Richardson P C, March 21, 2000: US06040937 (689 worldwide citation)

An interferometric modulator (Imod) cavity has a reflector and an induced absorber. A direct view reflective flat panel display may include an array of the modulators. Adjacent spacers of different thicknesses are fabricated on a substrate by a lift-off technique used to pattern the spacers which ar ...


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Mark W Miles: Photonic mems and structures. Iridigm Display Corporation, Blakely Sokoloff Taylor & Zafman, November 18, 2003: US06650455 (672 worldwide citation)

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic ...


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Mark W Miles: Interferometric modulation of radiation. Iridigm Display Corporation, Blakely Sokoloff Taylor & Zafman, January 20, 2004: US06680792 (662 worldwide citation)

An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, address ...


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Mark W Miles: Visible spectrum modulator arrays. Etalon, Fish & Richardson PC, November 10, 1998: US05835255 (616 worldwide citation)

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characte ...


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Clarence Chui, Mark W Miles: Microelectromechanical systems device and method for fabricating same. Iridigm Display Corporation, Blakely Sokoloff Taylor & Zafman, June 3, 2003: US06574033 (611 worldwide citation)

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to ...


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Mark W Miles: Photonic MEMS and structures. IDC, Knobbe Martens Olson & Bear, October 17, 2006: US07123216 (604 worldwide citation)

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic ...


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Mark W Miles: Visible spectrum modulator arrays. Etalon, Fish & Richardson P C, November 16, 1999: US05986796 (593 worldwide citation)

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characte ...


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Mark W Miles: Method for fabricating a structure for a microelectromechanical systems (MEMS) device. Iridigm Display Corporation, Blakely Sokoloff Taylor & Zafman, September 21, 2004: US06794119 (531 worldwide citation)

The invention provides a microfabrication process which may be used to manufacture a MEMS device. The process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack of layers being a sacrificial layer; patterning said one or a stack of layer ...


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Mark W Miles, Clarence Chui: Controlling micro-electro-mechanical cavities. Iridigm Display Corporation, Blakely Sokoloff Taylor & Zafman, March 23, 2004: US06710908 (483 worldwide citation)

Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical struc ...