1
Marcy Raymond: Electro-optical image-tracing systems, particularly for use with laser beams. Thompson CSF, January 4, 1972: US3632205 (96 worldwide citation)

To provide for digital positioning, without inertia of moving parts, a laser beam is transmitted to a substrate which is to be exposed, etched, or the like, particularly when microcircuits are to be produced, by monitoring the displacement of the substrate, mechanically, in two mutually perpendicula ...


2
Hepner Georges, Lacombat Michel, Marcy Raymond: Micro positioning apparatus. Compagnie Francaise Thomson Houston Hotchkiss Brandt, Frishauf Stephen H, January 15, 1974: US3786332 (20 worldwide citation)

A workpiece is positioned in the order of tenths of microns, or less, with respect to a fixed assembly, with automatic stabilization of coordinates by apparatus having a solid base with two movable carriages, displacable each in a different orthogonal direction, which drive a reference block bearing ...


3
Marcy Raymond: System for accurately positioning an object under the control of programmed numerical data. Thomson-CSF, March 6, 1973: US3719879 (17 worldwide citation)

System for accurately positioning objects in one plane by means of translational movements in one or more directions which comprises a numerically controlled stepping motor providing a coarse displacement, and piezoelectric ceramics included in a digital control loop for providing a fine displacemen ...


4
Marcy Raymond: Systems for writing patterns on photosensitive substrates. Thomson-CSF, Cushman Darby & Cushman, March 19, 1974: US3797935 (15 worldwide citation)

To carry out the exposure of a photoresist at a pattern scale of 1 : 1, a laser writing-in beam is projected onto the latter. The substrate carrying the photoresist undergoes displacements in at least one of two mutually perpendicular directions. Positioning of the laser beam is obtained through the ...


5
Marcy Raymond, Bouygues Jean, Lacombat Michel: Systems for accurately positioning an object in a plane by means of translatory movements. Thomson-CSF, September 19, 1972: US3692413 (14 worldwide citation)

The invention relates to a system for displacing an object supported on a carriage sliding above a bench, in such manner as to follow accurately a rectilinear trajectory. The lateral and rotational deviations of the object from the ideal trajectory are sensed by means of interferometer optical means ...


6
Marcy Raymond: Line tracing systems using laser energy for exposing photo-sensitive substrates. Thomson-CSF, May 15, 1973: US3732796 (14 worldwide citation)

The invention relates to systems for automatically tracing onto a photo-sensitive substrate various patterns such as used in the manufacture of integrated circuits. The system according to the invention comprise means for displacing the substrate along two mutually perpendicular directions, means fo ...


7
Marcy Raymond: Electro-optical system for controlling the attitude of a stage mounted on a carriage sliding along a parallel bench. Thomson-CSF, February 6, 1973: US3715599 (12 worldwide citation)

Electro-optical system for controlling the attitude of a stage mounted on a carriage sliding along a parallel bench.The system in accordance with the invention corrects 'yaw' defects on the part of the moving element sliding along the bench. To this end a beam of radiant energy supplies the directio ...


8
Marcy Raymond, Lacombat Michel: Optical contacting systems for positioning and metrology systems. Thomson-CSF, June 12, 1973: US3738754 (5 worldwide citation)

The invention relates to optical connecting systems for accurately positioning a surface with respect to another surface.The contacting system according to the invention comprises a Michelson interferometer in one arm of which an optical length modulating device is introduced. The source of radiant ...


9
Marcy Raymond: Method of transferring radar tracks and/or marking targets.. Thomson-CSF, September 5, 1984: EP0117813-A1 (3 worldwide citation)

The method for transfer between two vehicles (V1, V2) involves measuring the positional coordinates (Xp1, Yp1, Xp2, Yp2) of the vehicles in a common reference system (XL, YL), measuring the orientations ( gamma 1, gamma 2) of the lines of sight (O1F1, O2F2) of the vehicles with respect to a common e ...


10
Marcy Raymond: Improvements in methods and arrangements for measuring and checking dimensions. Thomson Houston Comp Francaise, December 8, 1967: FR1504539-A (3 worldwide citation)

1,175,998. Mirror mounts. COMPAGNIE FRANCAISE THOMSON HOUSTON-HOTCHKISS BRANDT. July 21, 1967 [July 21, 1966], No.33762/67. Heading G2J. [Also in Division G1] A device for cyclicly modulating the length of the path taken by a beam F 1 comprises a pair of mirrors 21, 22 deflecting the beam F 1 to a p ...