1
Johannes C M Jasper, Erik R Loopstra, Theodorus M Modderman, Gerrit J Nijmeijer, Nicolaas A A J van Asten, Frederik T E Heuts, Jacobus Gemen, Richard J H Du Croo de Jongh, Marcus E J Boonman, Jacob F F Klinkhamer, Thomas J M Castenmiller: Off-axis levelling in lithographic projection apparatus. ASML Netherlands, Pillsbury Winthrop, January 6, 2004: US06674510 (94 worldwide citation)

In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure ...


2
Johannes C M Jasper, Erik R Loopstra, Theodorus M Modderman, Gerrit J Nijmeijer, Nicolaas A A J van Asten, Frederik T E Heuts, Jacobus Gemen, Richard J H Du Croo de Jongh, Marcus E J Boonman, Jacob F F Klinkhamer, Thomas J M Castenmiller: Off-axis leveling in lithographic projection apparatus. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, March 28, 2006: US07019815 (10 worldwide citation)

In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure ...


3
Theodorus M Modderman, Gerrit J Nijmeijer, Nicholaas A A J van Asten, Frederik T E Heuts, Richard J H Du Croo de Jongh, Marcus E J Boonman, Jacob F F Klinkhamer: Off-axis levelling in lithographic projection apparatus. ASML Netherlands, Pillsbury Winthrop Shaw Pittman, April 10, 2007: US07202938 (3 worldwide citation)

In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure ...