1
Makoto Aritsuka, Naruyuki Iwanaga: Method for purifying nitrogen trifluoride gas. Mitsui Toatsu Chemicals Incorporated, Fisher Christen & Sabol, June 12, 1990: US04933158 (68 worldwide citation)

There is here disclosed a method for removing nitrous oxide (N.sub.2 O), carbon dioxide (CO.sub.2) and dinitrogen difluoride (N.sub.2 F.sub.2) from a nitrogen trifluoride gas. The present invention is directed to a method for purifying a nitrogen trifluoride gas which comprises the steps of thermall ...


2
Makoto Aritsuka, Sadaichi Komohara, Isao Harada: Exhaust gas treating agent and a method of treating exhaust gas using the agent. Mitsui Toatsu Chemicals, Oblon Spivak McClelland Maier & Neustadt P C, March 17, 1998: US05728642 (3 worldwide citation)

There is provided with a method of treating an exhaust gas comprising the steps of loading into a column an exhaust gas treating agent containing as a main component a metal of which surface is fluorinated previously; passing through the column the exhaust gas containing nitrogen trifluoride as a co ...


3
Makoto Aritsuka, Atsuhisa Mimoto, Isao Harada: Process for the preparation of partially-substituted fluorosilane. Mitsui Toatsu Chemicals, Burns Doane Swecker & Mathis, September 13, 1994: US05346682

A process is provided by the present invention for the preparation of a partially-substituted fluorosilane represented by the following formula: SiH.sub.n F.sub.4-n wherein n stands for an integer of 1 to 3. The process comprises converting a corresponding partially-substituted chlorosilane represen ...


4
Masami Murakami, Shunsuke Oike, Yoshito Kurano, Makoto Aritsuka, Hiroko Wachi: Method and Apparatus for Producing Porous Silica. Mitsui Chemicals, Buchanan Ingersoll & Rooney PC, July 16, 2009: US20090179357-A1

There are provided a method for producing porous silica and a porous silica film having low specific dielectric constant and high mechanical strength, that are preferably applicable to optical functional materials, electronic functional materials or the like, and a method for producing an interlayer ...