1
Luen Chian Sun: Probing of device elements. Taiwan Semiconductor Manufacturing, Tung & Associates, June 7, 2005: US06902941 (100 worldwide citation)

A new and improved method for the probing of integrated circuits (ICs) and is particularly suitable for probing various elements of an IC for failure analysis or other electrical testing and/or measurement of the IC. The method includes providing a probe access trench in the IMD (intermetal dielectr ...


2
Luen Chian Sun: Acess trench probing of device elements. Taiwan Semiconductor Manufacturing, Tung & Associates, September 16, 2004: US20040180456-A1

A new and improved method for the probing of integrated circuits (ICs) and is particularly suitable for probing various elements of an IC for failure analysis or other electrical testing and/or measurement of the IC. The method includes providing a probe access trench in the IMD (intermetal dielectr ...



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