1
Danny Chien Lu, Allen Zhao, Peter Hsieh, Hong Shih, Li Xu, Yan Ye: Method of cleaning a semiconductor device processing chamber after a copper etch process. Applied Materials, Shirley L Church, March 5, 2002: US06352081 (110 worldwide citation)

The present invention is a method for removing deposited etch byproducts from surfaces of a semiconductor processing chamber after a copper etch process. The method of the invention comprises the following general steps: (a) an oxidation step, in which interior surfaces of the processing chamber are ...


2
Linghsiao Wang, Li Xu: System and methods for high rate hardware-accelerated network protocol processing. iStor Networks, Knobbe Martens Olson & Bear, June 17, 2008: US07389462 (80 worldwide citation)

Disclosed is a system and methods for accelerating network protocol processing for devices configured to process network traffic at relatively high data rates. The system incorporates a hardware-accelerated protocol processing module that handles steady state network traffic and a software-based pro ...


3
Jean Kodama, Li Xu: Network receive interface for high bandwidth hardware-accelerated packet processing. Istor Networks, Knobbe Martens Olson & Bear, December 2, 2008: US07460473 (69 worldwide citation)

Disclosed is a system and methods for accelerating network packet processing for devices configured to process network traffic at relatively high data rates. The system incorporates a hardware-accelerated packet processing module that handles in-sequence network packets and a software-based processi ...


4
Yi Li, Li Xu: Multicolor illumination device using moving plate with wavelength conversion materials. YLX, Chen Yoshimura, June 16, 2009: US07547114 (55 worldwide citation)

A multicolor illumination device using an excitation light source and a multi-segmented moving plate with wavelength conversion materials (e.g. phosphors) is disclosed. The exciting light source is a light emitting diode or a laser diode emitting in the UV and/or blue region. The wavelength conversi ...


5
Jianbo Lu, Todd Allen Brown, Li Xu, Joseph Carr Meyers: Integrated sensing system. Ford Global Technologies, Raymond Coppiellie, Artz & Artz P C, July 3, 2007: US07239949 (45 worldwide citation)

A vehicle control system includes a housed sensor cluster generating a plurality of signals. An integrated controller includes a sensor signal compensation unit and a kinematics unit, wherein the sensor signal compensation unit receives at least one of the plurality of signals and compensates for an ...


6
Jennifer Y Sun, Ren Guan Duan, Jie Yuan, Li Xu, Kenneth S Collins: Method and apparatus which reduce the erosion rate of surfaces exposed to halogen-containing plasmas. Applied Materials, Shirley L Church Esq, April 13, 2010: US07696117 (45 worldwide citation)

A ceramic article which is resistant to erosion by halogen-containing plasmas used in semiconductor processing. The ceramic article includes ceramic which is multi-phased, typically including two phase to three phases. The ceramic is formed from yttrium oxide at a molar concentration ranging from ab ...


7
Nianci Han, Li Xu, Hong Shih: Process chamber having component with yttrium-aluminum coating. Janah & Associates, Joseph Bach, September 13, 2005: US06942929 (39 worldwide citation)

A substrate processing chamber component is a structure having an integral surface coating comprising an yttrium-aluminum compound. The component may be fabricated by forming a metal alloy comprising yttrium and aluminum into the component shape and anodizing its surface to form an integral anodized ...


8
Jennifer Y Sun, Ren Guan Duan, Jie Yuan, Li Xu, Kenneth S Collins: Semiconductor processing apparatus which is formed from yttrium oxide and zirconium oxide to produce a solid solution ceramic apparatus. Applied Materials, Shirley L Church Esq, October 11, 2011: US08034734 (37 worldwide citation)

A solid solution-comprising ceramic article useful in semiconductor processing, which is resistant to erosion by halogen-containing plasmas. The solid solution-comprising ceramic article is formed from a combination of yttrium oxide and zirconium oxide. In a first embodiment, the ceramic article inc ...


9
Ling Chen, Rongsheng Roger Ruan, Jack Edgar Johnson, Paul Bradley Addis, Li Xu, Lun Yi: Cellulose fiber based compositions and film and the process for their manufacture. Agricultural Utilization Research Institute, Regents of the University of Minnesota, Schwegman Lundberg Woessner & Kluth P A, October 6, 1998: US05817381 (34 worldwide citation)

A process and materials are described in which highly refined celleuloise fibers are broken down into microfibers and further processed into compositions, films. coatings and solid materials which are biodegradable and even edible. The process for the formation of hardenable compositions may compris ...


10
Paul Ling Chen, Rongsheng Roger Ruan, Paul Bradley Addis, Li Xu, Lun Yi: Cellulose fiber based compositions and film and the process for their manufacture. Regents of the University of Minnesota, Schwegman Lundberg Woessner & Kluth P A, July 4, 2000: US06083582 (27 worldwide citation)

A process and materials are described in which highly refined cellulose fibers are broken down into microfibers and further processed into compositions, films, coatings and solid materials which are biodegradable and even edible. The process for the formation of hardenable compositions may comprise ...