1
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, James C Kesterson, James T Comfort, Melvin Sharp, October 29, 1991: US05061049 (708 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beams (30), address electrodes (42, 46), and landing electrodes (40, 41) to provide soft-landing of the beams on the landing electrodes (40, 41) which gives uniform large-angle deflection plus high reliability.


2
Larry J Hornbeck: Deformable mirror light modulator. Texas Instruments Incorporated, Robert Groover, Melvin Sharp, James T Comfort, April 10, 1984: US04441791 (620 worldwide citation)

A light modulator comprising a light-reflective metallized membrane defining a deformable mirror disposed over a semiconductor substrate of one conductivity type in which a matrix array of field effect address transistors are formed, the metallized membrane cooperating with a matrix of floating meta ...


3
Larry J Hornbeck: Spatial light modulator. Texas Instruments Incorporated, Melvin Sharp, James T Comfort, Carlton H Hoel, September 11, 1990: US04956619 (560 worldwide citation)

A deflectable beam spatial light modulator formed from a structure of a reflecting layer, typically metal, on a spacer layer, typically photoresist, which in turn is on a substrate containing electronic addressing circuitry is disclosed. Also, the method of fabrication including a plasma etch after ...


4
Larry J Hornbeck, William E Nelson: Spatial light modulator and method. Texas Instruments Incorporated, James C Kesterson, B Peter Barndt, Richard L Donaldson, March 17, 1992: US05096279 (511 worldwide citation)

A method of resetting deflectable pixels of a spatial light modulator is disclosed. A pulse train of voltage is applied to the device to cause it to mobe from its deflected position.


5
Larry J Hornbeck: Multi-level deformable mirror device. Texas Instruments Incorporated, Richard A Stoltz, Richard Donaldson, Rene Grossman, January 28, 1992: US05083857 (493 worldwide citation)

A bistable deformable mirror device (DMD) pixel architecture is disclosed, wherein the torsion hinges are placed in a layer different from the torsion beam layer. This results in pixels which can be scaled to smaller dimensions while at the same time maintaining a large fractional active area, an im ...


6
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Robert O Groover, James T Comfort, January 28, 1986: US04566935 (488 worldwide citation)

Methods of fabrication of spatial light modulators with deflectable beams by plasma etching after dicing of a substrate into chips, each of the chips an SLM, is disclosed. Also, various architectures available with such plasma etching process are disclosed and include metal cloverleafs for substrate ...


7
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Leo N Heiting, Melvin Sharp, May 5, 1987: US04662746 (481 worldwide citation)

An electrostatically deflectable beam spatial light modulator with the beam composed of two layers of aluminum alloy and the hinge connecting the beam to the remainder of the alloy formed in only one of the two layers; this provides a thick stiff beam and a thin compliant hinge. The alloy is on a sp ...


8
Larry J Hornbeck: Spatial light modulator and method. Texas Instruments Incorporated, Carlton H Hoel, Leo N Heiting, Melvin Sharp, December 1, 1987: US04710732 (461 worldwide citation)

Spatial light modulators with deflectable metal flaps hinged to conducting posts on a substrate are disclosed. The metal flaps and conducting post may be a single piece, and connected to addressing circuitry in the substrate. Also, plasma etching to fabricate the flaps without breakage is disclosed.


9
Larry J Hornbeck: Active yoke hidden hinge digital micromirror device. Texas Instruments Incorporated, Robert C Klinger, James C Kesterson, Richard L Donaldson, July 9, 1996: US05535047 (444 worldwide citation)

A spatial light modulator (10) of the DMD type having increased performance parameters. A pixel mirror (30) is supported by a yoke (32), whereby electrostatic attraction forces (70, 76, 80, 82) are generated between several structures. First, between the elevated mirror (30) and an elevated address ...


10
Larry J Hornbeck: Multi-level digital micromirror device. Texas Instruments Incorporated, James C Kesterson, Charles A Brill, Richard L Donaldson, December 10, 1996: US05583688 (433 worldwide citation)

An improved hidden hinge digital micromirror device, and method of making the same, having hinges 424 attached to a yoke 428 which limits the rotation of the device mirror 430. In one embodiment, the mirror 430 is supported by a center support post 416 attached to two torsion hinges 424 by a landing ...



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