1
Peter Porshnev, Sebastien Raoux, Mike Woolston, Christopher L Aardahl, Rick J Orth, Kenneth G Rappe: Treatment of effluent from a substrate processing chamber. Applied Materials, Ashok K Janah, January 9, 2007: US07160521 (17 worldwide citation)

A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of t ...


2
Gary B Josephson, Delbert L Lessor, Amit K Sharma, Christopher Lyle Aardahl, Kenneth G Rappe: Processes and apparatuses for treating halogen-containing gases. Battelle Memorial Institute, Klarquist Sparkman, November 8, 2005: US06962679 (5 worldwide citation)

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as F2 that involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a re ...


3
Darrell R Herling, Chris L Aardahl, Robert T Rozmiarek, Kenneth G Rappe, Yong Wang, Jamelyn D Holladay: Method of generating hydrocarbon reagents from diesel, natural gas and other logistical fuels. Battelle Memorial Institute, Derek H Maughan, October 14, 2008: US07435760 (4 worldwide citation)

The present invention provides a process for producing reagents for a chemical reaction by introducing a fuel containing hydrocarbons into a flash distillation process wherein the fuel is separated into a first component having a lower average molecular weight and a second component having a higher ...


4
Gary B Josephson, Delbert L Lessor, Amit K Sharma, Christopher Lyle Aardahl, Kenneth G Rappe: Processes and apparatuses for treating halogen-containing gases. Battelle Memorial Institute, Klarquist Sparkman, August 5, 2008: US07407635

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as F2 that involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a re ...


5
Darrell R Herling, Chris L Aardahl, Robert T Rozmiarek, Kenneth G Rappe, Yong Wang, Jamelyn D Holladay: Method of generating hydrocarbon reagents from diesel, natural gas and other logistical fuels. Battelle Memorial Institute, Derek H Maughan, June 29, 2010: US07744751

The present invention provides a process for producing reagents for a chemical reaction by introducing a fuel containing hydrocarbons into a flash distillation process wherein the fuel is separated into a first component having a lower average molecular weight and a second component having a higher ...


6
Gary B Josephson, Delbert L Lessor, Amit K Sharma, Christopher Lyle Aardahl, Kenneth G Rappe: Processes and apparatuses for treating halogen-containing gases. Battelle Memorial Institute, Klarquist Sparkman, One World Trade Center, July 8, 2004: US20040131524-A1

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as F2 that involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a re ...


7
Gary B Josephson, Delbert L Lessor, Kenneth G Rappe, Rick J Orth, Christopher L Aardahl: Processes and apparatuses for treating halogen-containing gases. Battelle Memorial Institute, Klarquist Sparkman, One World Trade Center, August 28, 2003: US20030161774-A1

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as F2 that involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a re ...


8
Peter Porshnev, Sebastien Raoux, Mike Woolston, Christopher L Aardahl, Rick J Orth, Kenneth G Rappe: Treatment of effluent from a substrate processing chamber. Applied Materials, Applied Materials, Patent Department M S 2061, January 1, 2004: US20040001787-A1

A substrate processing apparatus has a process chamber and an effluent treatment reactor. The process chamber has a substrate support, a process gas supply, a gas energizer, and an exhaust conduit. The effluent treatment reactor has an effluent inlet to receive effluent from the exhaust conduit of t ...


9
Gary B Josephson, Delbert L Lessor, Amit K Sharma, Christopher Lyle Aardahl, Kenneth G Rappe: Processes and apparatuses for treating halogen-containing gases. Battelle Memorial Institute, Klarquist Sparkman Campbell, Leigh & Whinston, January 16, 2003: US20030012718-A1

There are disclosed various processes, apparatuses and systems for treating a halogen-containing gas such as F2 that involve generating a plasma in order to reduce chemically the halogen-containing gas into products that are more environmentally manageable. According to a particular embodiment, a re ...


10
Darrell R Herling, Chris L Aardahl, Robert T Rozmiarek, Kenneth G Rappe, Yong Wang, Jamelyn D Holladay: Method of generating hydrocarbon reagents from diesel, natural gas and other logistical fuels. Battelle Memorial Institute, Battelle Memorial Institute, December 1, 2005: US20050267224-A1

The present invention provides a process for producing reagents for a chemical reaction by introducing a fuel containing hydrocarbons into a flash distillation process wherein the fuel is separated into a first component having a lower average molecular weight and a second component having a higher ...



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