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William J Fosnight, Raymond S Martin, Joshua W Shenk, Robert P Wartenbergh: SMIF container including a reticle support structure. Asyst Technologies, Fliesler Dubb Meyer & Lovejoy, April 17, 2001: US06216873 (58 worldwide citation)

A reticle support mechanism is disclosed in which a reticle may be quickly and easily located and removed, and which is capable of securely supporting a reticle for storage and/or transport. A preferred embodiment of the present invention includes a pair of reticle supports mounted to a door of a co ...


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William J Fosnight, Joshua W Shenk: Pod to port door retention and evacuation system. Asyst Technologies, Fliesler Dubb Meyer & Lovejoy, July 17, 2001: US06261044 (28 worldwide citation)

A system is disclosed for retaining a pod door on a port door at a load port, and for removing contaminants, particulates and/or gasses from between the pod and port door surfaces and from within the interior of the pod door. According to a preferred embodiment of the present invention, a vacuum sou ...


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