1
Anthony Michael Palagonia, Paul Joseph Pikna, John Thomas Maddix: Micro probe assembly and method of fabrication. International Business Machines Corporation, Robert A Walsh, May 9, 2000: US06059982 (131 worldwide citation)

A probe assembly including an integral fine probe tip, conductive line with terminal connection for testing semiconductor devices and a method of construction of the probe assembly is described. The method of construction described utilizes the step of etching pits into silicon wafers to produce mol ...


2
John Thomas Maddix, Anthony Michael Palagonia, Paul Joseph Pikna, David Paul Vallett: Micro probe ring assembly and method of fabrication. International Business Machines Corporation, Robert A Walsh, January 11, 2000: US06014032 (68 worldwide citation)

A multi-probe ring assembly including integral fine probe tips, conductive lines with terminal connection for testing semiconductor devices and a method of construction of the multi-probe ring assembly is described. The method of construction described utilizes the step of etching pits into silicon ...


3
John Thomas Maddix, Anthony Michael Palagonia, Paul Joseph Pikna, David Paul Vallett: Micro probe ring assembly and method of fabrication. International Business Machines Corporation, Robert A Walsh, May 15, 2001: US06232143 (35 worldwide citation)

A multi-probe ring assembly including integral fine probe tips, conductive lines with terminal connection for testing semiconductor devices and a method of construction of the multi-probe ring assembly is described. The method of construction described utilizes the step of etching pits into silicon ...