1
Dan Meisberger, Alan D Brodie, Anil A Desai, Dennis G Emge, Zhong Wei Chen, Richard Simmons, Dave E A Smith, April Dutta, J Kirkwood H Rough, Leslie A Honfi, Henry Pearce Percy, John McMurtry, Eric Munro: Electron beam inspection system and method. KLA Instruments Corporation, Allston L Jones, November 26, 1996: US05578821 (185 worldwide citation)

A method and apparatus for a charged particle scanning system and an automatic inspection system, including wafers and masks used in microcircuit fabrication. A charged particle beam is directed at the surface of a substrate for scanning that substrate and a selection of detectors are included to de ...


2
Alan D Brodie, Curt Chadwick, Anil Desai, Hans Dohse, Dennis Emge, John Greene, Ralph Johnson, Ming Yie Ling, John McMurtry, Barry Becker, Ray Paul, Mike Robinson, Richard Simmons, David E A Smith, John Taylor, Lee Veneklasen, Dean Walters, Paul Wieczorek, Sam Wong, April Dutta, Surendra Lele, Kirkwood Rough, Henry Pearce Percy, Jack Y Jau, Chun C Lin, Hoi T Nguyen, Yen Jen Oyang, Timothy L Hutcheson, David J Clark, Chung Shih Pan, Chetana Bhaskar, Chris Kirk, Eric Munro: Electron beam inspection system and method. KLA Instruments Corporation, Allston L Jones, March 26, 1996: US05502306 (177 worldwide citation)

There is disclosed numerous embodiments of a method and apparatus for a particle scanning system and an automatic inspection system. In each of these a particle beam is directed at the surface of a substrate for scanning that substrate. Also included are a selection of detectors to detect at least o ...


3
Gil Delgado, John McMurtry, James Wiley: Method and apparatus for protecting surfaces of optical components. KLA Tencor Technologies Corporation, Beyer Weaver & Thomas, November 21, 2006: US07138640 (17 worldwide citation)

The invention pertains to mechanisms for protecting surfaces of optical components of an optical inspection system. One aspect of the invention relates to a gas purge system that produces a gas stream that blocks contaminants from reaching the optical surfaces of the optical components and that tran ...