1
Ana Londergan
Ana R Londergan, Bangalore R Natarajan, Evgeni Gousev, James Randolph Webster, David Heald: MEMS cavity-coating layers and methods. Qualcomm Mems Technologies, Knobbe Martens Olson & Bear, June 8, 2010: US07733552 (12 worldwide citation)

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the lay ...


2
Ana Londergan
Ana R Londergan, Bangalore R Natarajan, Evgeni Gousev, James Randolph Webster, David Heald: MEMS cavity-coating layers and methods. Qualcomm Mems Technologies, Knobbe Martens Olson & Bear, April 24, 2012: US08164815 (4 worldwide citation)

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the lay ...


3
Ana Londergan
Ana R Londergan, Bangalore R Natarajan, Evgeni Gousev, James Randolph Webster, David Heald: Mems cavity-coating layers and methods. Qualcomm Mems Technologies, August 16, 2012: US20120206462-A1

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the lay ...


4
Ana Londergan
Ana R Londergan, Bangalore R Natarajan, Evgeni Gousev, James Randolph Webster, David Heald: Mems cavity-coating layers and methods. Qualcomm Mems Technologies, Knobbe Martens Olson & Bear, September 30, 2010: US20100245979-A1

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the lay ...


5
Ana Londergan
Ana R Londergan, Bangalore R Natarajan, Evgeni Gousev, James Randolph Webster, David Heald: Mems cavity-coating layers and methods. QUALCOMM Incorporated, Knobbe Martens Olson & Bear, September 25, 2008: US20080231931-A1

Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the lay ...


6
James Randolph Webster: Human-readable, bi-state environmental sensors based on micro-mechanical membranes. QUALCOMM MEMS Technologies, Knobbe Martens Olson & Bear, August 31, 2010: US07787130 (15 worldwide citation)

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movab ...


7
Manish Kothari, James Randolph Webster, Gaurav Sethi, Alok Govil, Jonathan Charles Griffiths: Integrated light emitting and light detecting device. QUALCOMM MEMS Technologies, Knobbe Martens Olson & Bear, March 20, 2012: US08138479 (8 worldwide citation)

Methods and systems for providing a light device that can emit light and sense light are disclosed. In one embodiment, a lighting device includes a light guide having a planar first surface, the light guide configured such that at least some ambient light enters the light guide through the first sur ...


8
James Randolph Webster: Human-readable, bi-state environmental sensors based on micro-mechanical membranes. QUALCOMM MEMS Technologies, Knobbe Martens Olson & Bear, December 14, 2010: US07852491 (6 worldwide citation)

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movab ...


9
James Randolph Webster: Human-readable, bi-state environmental sensors based on micro-mechanical membranes. QUALCOMM MEMS Technologies, Knobbe Martens Olson & Bear, August 31, 2010: US07787171 (5 worldwide citation)

An environmental sensing device includes an interferometric modulator which permanently actuates, in a visually-detectable manner, in response to being exposed to a predetermined environmental threshold or condition. The device can include a reactive layer, coating, or proof mass disposed on a movab ...


10
James Randolph Webster, Thanh Nghia Tu, Xiaoming Yan, Wonsuk Chung: Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices. Qualcomm MEMS Technologies, Knobbe Martens Olson & Bear, December 14, 2010: US07851239 (2 worldwide citation)

Methods of fabricating an electromechanical systems device that mitigate permanent adhesion, or stiction, of the moveable components of the device are provided. The methods provide an amorphous silicon sacrificial layer with improved and reproducible surface roughness. The amorphous silicon sacrific ...