1
Virginia M Chung, Joseph B Frei, James E Stuart: System and method for preparing shape data for proximity correction. International Business Machines Corporation, Charles W Peterson Jr, Whitham Curtis Whitham & McGinn, July 11, 1995: US05432714 (65 worldwide citation)

In electron beam lithography, an apparatus and method decompose rectangles at the exterior of a desired electron beam exposure pattern into portions having a substantially constant environment. This process also includes sorting of rectangles into bands in order of addresses of the rectangles and th ...


2
Virginia M Chung, Joseph B Frei, James E Stuart: E-beam control data compaction system and method. International Business Machines Corporation, Charles W Peterson Jr, October 5, 1993: US05251140 (23 worldwide citation)

A method of converting circuit design shapes into optimized numerical control (NC) data for controlling an electron beam (e-beam) exposure system. During post processing of a circuit design layout, shapes with angled edges are covered or filled with rectangles and triangular trapezoidal or paralello ...


3
Virginia M Chung, James E Stuart: Method and apparatus for automatically recognizing repeated shapes for data compaction. International Business Machines Corporation, Charles W Peterson Jr, Whitham Curtis Whitham & McGinn, January 2, 1996: US05481472 (13 worldwide citation)

A methodology and apparatus for extracting repeated data from a large body of data for compaction and reproduction by step-and-repeat operations includes extraction of data based on common parameters and a variable parameter. Lists are formed from the extracted data after ordering and repeat displac ...


4
Virginia M Chung, James E Stuart: Method and apparatus for automatically recognizing repeated shapes for data compaction. International Business Machines Corporation, H Daniel Schnurmann, Whitham Curtis Whitham & McGinn, December 16, 1997: US05699266 (6 worldwide citation)

A methodology and apparatus for extracting repeated data from a large body of data for compaction and reproduction by step-and-repeat operations includes extraction of data based on common parameters and a variable parameter. Lists are formed from the extracted data after ordering and repeat displac ...