1
Franken Dominicus Jacobus, Jacobs Franciscus Mathijs, Van Kimmenade Johannes Mathijs, Van Dijk Cornelis Dionysius, Van Eijk Jan: Lithographic device with a suspended object table.. Philips, Asm Lithography, August 12, 1992: EP0498496-A1 (17 worldwide citation)

A lithographic device with a lithographic irradiation system (1, 13) which is fastened near a lower side to a mounting member (5) of a frame (7). The device is provided with a unit (65) which is formed by a positioning device (37), with which an object table (21) arranged below the irradiation syste ...


2
Segers Hubert Marie, Boon Rudolf Maria, Bijnagte Anton Adriaan, Jacobs Franciscus Mathijs: Lithographic projection apparatus. Asm Lithography, November 15, 2000: EP1052548-A2 (2 worldwide citation)

A lithographic projection apparatus, comprising: a radiation system for supplying a projection beam of radiation; a mask table provided with a mask holder for holding a mask; a substrate table provided with a substrate holder for holding a substrate; a projection system for imaging an irradiated por ...