1
Hiroki Obi: Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects. Tokyo Electron, Oblon Spivak McClelland Maier & Neustadt P C, July 12, 2005: US06917698 (9 worldwide citation)

Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual ...


2
Hiroki Obi: Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects. Tokyo Electron, Oblon Spivak McClelland Maier & Neustadt P C, June 3, 2008: US07382914 (2 worldwide citation)

Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual ...


3
Hiroshi Yamada, Hiroki Obi: Probe card attaching method. Tokyo Electron, Pearne & Gordon, February 14, 2017: US09568501

A probe card attaching method makes it easy to attach/detach a probe card to/from a transfer stage. In a wafer inspection apparatus 10, a reference position is determined by moving a transfer stage 18 to align a stage-side camera 28 with a tester-side camera 16 in a tester 15, a first distance from ...


4
Hiroki Obi: Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects. Oblon Spivak Mcclelland Maier & Neustadt PC, May 9, 2002: US20020054209-A1

Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual ...


5
Hiroki Obi: Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects. Oblon Spivak Mcclelland Maier & Neustadt PC, October 20, 2005: US20050232479-A1

Disclosed is a case where an aligning method according to the present invention is applied to a probe apparatus. Target probes are photographed by an upper CCD camera and target electrode pads are photographed by a lower CCD camera. Second virtual images of the photographed probes and first virtual ...


6
Hiroki OBI, Hiroshi YAMADA: Probe card detecting apparatus, wafer position alignment apparatus and wafer position alignment method. Tokyo Electron, September 27, 2012: US20120242359-A1

A probe card detecting apparatus includes a probe detecting chamber having a supporting body, a probe card positioned and mounted detachably via a first holder on the predetermined position of the supporting body, a first imaging device movably provided in the probe detecting chamber to detect needl ...


7
Hiroki Obi, Hiroshi Ymada: Probe card detecting apparatus, wafer position alignment apparatus and wafer position alignment method. Tokyo Electron, liu xinyu zhang huihua, September 26, 2012: CN201210069238

The invention provides a probe card detecting apparatus, a wafer position alignment apparatus and a wafer position alignment method. The probe card detecting apparatus includes a probe detecting chamber having a supporting body, a probe card positioned and mounted detachably via a first holder on th ...