1
Herschel M Marchman: Fiber probe device having multiple diameters. AT&T, David I Caplan, February 28, 1995: US05394500 (35 worldwide citation)

A fiber probe device includes a fiber segment that has at least three sections. An uppermost section has the largest diameter; an intermediate section has an intermediate diameter, and a lowest section (tip) has the smallest diameter. The presence of the intermediate section enables control over the ...


2
Herschel M Marchman, Aaron D Shore: Apparatus and techniques for scanning electron beam based chip repair. International Business Machines Corporation, Kelly M Reynolds, Tiffany L Townsend, Delio & Peterson, September 7, 2004: US06787783 (26 worldwide citation)

A method and apparatus for editing an integrated circuit by bombarding a feature in need of editing with either a low-energy or high-energy electron beam in the presence of a gas whereby low energy electrons activate reactants adsorbed on the surface of the feature in need of editing to form active ...


3
Robert W Filas, Herschel M Marchman: Cylindrical fiber probes and methods of making them. AT&T, David I Caplan, October 29, 1996: US05570441 (19 worldwide citation)

This invention involves a fiber probe device and a method of making it. The probe includes a relatively thick upper cylindrical portion, typically in the form of a solid fight circular cylinder, terminating in a tapered portion that terminates in a relatively thin lower cylindrical portion, typicall ...


4
Robert W Filas, Herschel M Marchman: Fiber probe fabrication having a tip with concave sidewalls. AT&T, David I Caplan, January 2, 1996: US05480046 (16 worldwide citation)

A probe device is fabricated from a glass fiber segment by first isotropically etching only a portion of the diameter of only a bottom region thereof. Next, the bottom region is cleaved, to produce a cleaved bottom endface. Then the cleaved endface and a height of the sidewalls of the bottom region ...


5

6
Herschel M Marchman: Method of making fiber probe devices using patterned reactive ion etching. AT&T, David I Caplan, March 7, 1995: US05395741 (9 worldwide citation)

A fiber probe is formed from a cladded optical fiber segment by isotropically etching a lower portion of the fiber segment, followed by cleaving the resulting etched lower portion. The resulting cleaved endface of the fiber segment is then coated with a protective layer which is then patterned by ex ...


7
Herschel M Marchman, Steven B Herschbein, Chad Rue, Michael Renner, Narender Rana: High-resolution optical channel for non-destructive navigation and processing of integrated circuits. International Business Machines Corporation, Todd M C Li, April 1, 2008: US07351966 (8 worldwide citation)

An optical-fiber based light channel system is included in an ion/electron beam tool for imaging and/or processing integrated circuits. The optical channel system includes an image collection portion, an optical fiber image transmission portion and a detector portion. The image collection portion in ...


8
Robert W Filas, Herschel M Marchman: Cylindrical fiber probe devices and methods of making them. AT&T, David I Caplan, July 2, 1996: US05531343 (3 worldwide citation)

This invention involves a fiber probe device and a method of making it. The probe includes a relatively thick upper cylindrical region, typically in the form of a solid right circular cylinder, terminating in a tapered region that terminates in a relatively thin lower cylindrical region (tip), typic ...


9
Supratik Guha, Hendrik F Hamann, Herschel M Marchman, Robert J Von Gutfeld: Method and apparatus for fabricating or altering microstructures using local chemical alterations. International Business Machines Corporation, Vazken Alexanian, April 7, 2015: US08999458

A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.


10
Supratik Guha, Hendrik F Hamann, Herschel M Marchman, Robert J Von Gutfeld: Method and apparatus for fabricating or altering microstructures using local chemical alterations. International Business Machines Corporation, May 22, 2012: US08181594

A method and apparatus for fabricating or altering a microstructure use means for heating to facilitate a local chemical reaction that forms or alters the submicrostructure.



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