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Herman Vogel, Klaus Simon, Antonius Theodorus Anna Maria Derksen: Immersion photolithography system and method using microchannel nozzles. ASML Holding, Sterne Kessler Goldstein & Fox P L L C, March 15, 2005: US06867844 (238 worldwide citation)

A liquid immersion photolithography system includes an exposure system that exposes a substrate with electromagnetic radiation and includes a projection optical system that focuses the electromagnetic radiation on the substrate. A liquid supply system provides liquid flow between the projection opti ...


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Marvin J Parnes, Herman Vogel: Oil cooler for fan jet engines. Avco Corporation, Perman & Green, April 10, 1990: US04914904 (41 worldwide citation)

A turbo fan gas turbine engine is disclosed which includes a central engine and a shroud-enclosed fan, the shroud being supported by a plurality of structural struts extending from the central engine to the shroud. A plurality of tubes internal to each strut are provided with fins to increase their ...


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Herman Vogel: Methods and systems for compact, micro-channel laminar heat exchanging. ASML Holding, Sterne Kessler Goldstein & Fox PLLC, June 26, 2007: US07234514 (23 worldwide citation)

A heat exchanging core for a micro-channel heat exchanger includes at least one heat conducting plate, which has at least one channel formed between a first side and a second side of the heat conducting plate. The at least one channel has a channel length to hydraulic diameter ratio of less than 100 ...


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Herman Vogel, E Joel McCorkle: Fluid conveying device with removable connection. The Perkin Elmer Corporation, David Aker, Herbert S Ingham, Edwin T Grimes, February 10, 1998: US05716082 (13 worldwide citation)

A cryogenic fluid conveying device has removable connection of a metal tube and a receptor for the tube. The receptor is formed of a housing member with an aperture therein for conveying the fluid. A tubular member of resilient PTFE has a bore size so as to be slidingly receptive of the rigid tube. ...


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E Joel McCorkle, Herman Vogel, Marcel Margulies, Richard T Ferranti: Apparatus for controlling level of cryogenic liquid. The Perkin Elmer Corporation, Edwin T Grimes, Herbert S Ingham, David Aker, September 30, 1997: US05671603 (13 worldwide citation)

An apparatus for controlling level of cryogenic liquid in a vessel includes a transfer duct to a pressure supply tank. Pressure pulses are applied to the tank at one rate when the level is below a primary sensor in the vessel, and at a lower rate when the level is above the sensor, so as to compensa ...


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Herman Vogel: Calorimeter having rapid cooling of a heating vessel therein. The Perkin Elmer Corporation, Herbert S Ingham, Edwin T Grimes, David Aker, March 2, 1999: US05876118 (12 worldwide citation)

A calorimeter apparatus includes a facility for rapid cooling of a heating vessel therein. A jacket surrounds the vessel wall. A partition member between the jacket and the vessel wall defines an inlet plenum adjacent the jacket and a spatial gap adjacent the vessel wall. Pressurized cooling gas is ...


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Herman Vogel, Klaus Simon, Antonius Theodorus Anna Maria Derksen: Immersion photolithography system and method using microchannel nozzles. ASML Holding, Sterne Kessler Goldstein & Fox P L L C, August 12, 2008: US07411650 (10 worldwide citation)

A liquid immersion photolithography system includes an exposure system that exposes a substrate with electromagnetic radiation and includes a projection optical system that focuses the electromagnetic radiation on the substrate. A liquid supply system provides liquid flow between the projection opti ...


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Gary W Decko, Yao Peng, Herman Vogel: Stress relief support structures and assemblies. Avco Corporation, Perman & Green, February 7, 1989: US04802823 (10 worldwide citation)

An improved design for a structure such as a turbine vane or blade subjected to extreme temperature levels and/or gradients resulting in extreme deformation stresses within the structure. The present structures comprise an interior skeletal support having a plurality of spaced, flexible support legs ...